Review on the modeling of electrostatic MEMS

Wan Chun Chuang; Hsin Li Lee; Pei Zen Chang; Yuh Chung Hu

doi:10.3390/s100606149

Review on the modeling of electrostatic MEMS

Wan Chun Chuang, Hsin Li Lee, Pei Zen Chang, Yuh Chung Hu

Department of Engineering Science

Research output: Contribution to journal › Review article › peer-review

149 Citations (Scopus)

Abstract

Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices.

Original language	English
Pages (from-to)	6149-6171
Number of pages	23
Journal	Sensors
Volume	10
Issue number	6
DOIs	https://doi.org/10.3390/s100606149
Publication status	Published - 2010 Jun

All Science Journal Classification (ASJC) codes

Analytical Chemistry
Biochemistry
Atomic and Molecular Physics, and Optics
Instrumentation
Electrical and Electronic Engineering

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10.3390/s100606149

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abstract = "Electrostatic-driven microelectromechanical systems devices, in most cases, consist of couplings of such energy domains as electromechanics, optical electricity, thermoelectricity, and electromagnetism. Their nonlinear working state makes their analysis complex and complicated. This article introduces the physical model of pull-in voltage, dynamic characteristic analysis, air damping effect, reliability, numerical modeling method, and application of electrostatic-driven MEMS devices.",

author = "Chuang, {Wan Chun} and Lee, {Hsin Li} and Chang, {Pei Zen} and Hu, {Yuh Chung}",

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Review on the modeling of electrostatic MEMS

Abstract

All Science Journal Classification (ASJC) codes

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