Review on the modeling of electrostatic MEMS

Wan Chun Chuang, Hsin Li Lee, Pei Zen Chang, Yuh Chung Hu

Research output: Contribution to journalReview articlepeer-review

155 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Review on the modeling of electrostatic MEMS'. Together they form a unique fingerprint.

Chemical Compounds

Physics & Astronomy

Engineering & Materials Science

Medicine & Life Sciences