Robust control design based on perturbation cancellation for micro-positioning design with hysteresis

Yung Yue Chen, Yu Jen Lan, Yi Qing Zhang

Research output: Contribution to journalArticlepeer-review


Based on the superiority of the piezoelectric elements, including lightweight, high electric mechanical transformation efficiency and a quick response time, a piezoelectric-based micro-positioning actuator is developed in this investigation. For eliminating the effects of hysteresis and modeling uncertainties that appeared in this micro-positioning actuator, a nonlinear adaptive fuzzy robust control design with a perturbation cancellation ability is proposed for this micro-positioning design to achieve a positioning resolution of 1 µm. Structurally, this proposed robust control methodology contains two particular parts: a universal fuzzy approximator and a robust compensator, which are employed to cancel the modeling uncertainties caused by the perturbed parts of the micro-positioning actuator and mitigate the approximation error between the modeling uncertainties and the universal fuzzy approximator, respectively. From both the numerical simulations and real validations, this proposed micro-positioning design performs a promising positioning performance in the micrometer level.

Original languageEnglish
Article number278
Issue number11
Publication statusPublished - 2021 Nov

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Control and Optimization


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