Role of crystallized phases in sheet resistance of amorphous AgInSbTe chalcogenide film

Chien Chih Chou, Fei-Yi Hung, Truan-Sheng Lui

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)

Abstract

AgInSbTe film was deposited on alkali-free glass using the radio-frequency sputtering method. Variations in sheet resistance with annealing temperatures were accompanied by the crystallization of amorphous films. Grazing-incidence X-ray diffractometer and transmission electron microscopy observations indicated amorphous characteristics for as-deposited films and the crystallized δ-Sb and AgSbTe2 phases for annealed films. The transition temperature of sheet resistance is around 150-160 °C, which is lower than the crystallization temperature obtained by differential scanning calorimetry.

Original languageEnglish
Pages (from-to)1107-1110
Number of pages4
JournalScripta Materialia
Volume56
Issue number12
DOIs
Publication statusPublished - 2007 Jun 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Materials Science(all)
  • Metals and Alloys

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