Role of crystallized phases in sheet resistance of amorphous AgInSbTe chalcogenide film

Chien Chih Chou; Fei Yi Hung; Truan Sheng Lui

doi:10.1016/j.scriptamat.2007.02.005

Role of crystallized phases in sheet resistance of amorphous AgInSbTe chalcogenide film

Chien Chih Chou
, Fei Yi Hung
, Truan Sheng Lui

Research output: Contribution to journal › Article › peer-review

17 Citations (Scopus)

Abstract

AgInSbTe film was deposited on alkali-free glass using the radio-frequency sputtering method. Variations in sheet resistance with annealing temperatures were accompanied by the crystallization of amorphous films. Grazing-incidence X-ray diffractometer and transmission electron microscopy observations indicated amorphous characteristics for as-deposited films and the crystallized δ-Sb and AgSbTe₂ phases for annealed films. The transition temperature of sheet resistance is around 150-160 °C, which is lower than the crystallization temperature obtained by differential scanning calorimetry.

Original language	English
Pages (from-to)	1107-1110
Number of pages	4
Journal	Scripta Materialia
Volume	56
Issue number	12
DOIs	https://doi.org/10.1016/j.scriptamat.2007.02.005
Publication status	Published - 2007 Jun

All Science Journal Classification (ASJC) codes

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering
Metals and Alloys

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10.1016/j.scriptamat.2007.02.005

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abstract = "AgInSbTe film was deposited on alkali-free glass using the radio-frequency sputtering method. Variations in sheet resistance with annealing temperatures were accompanied by the crystallization of amorphous films. Grazing-incidence X-ray diffractometer and transmission electron microscopy observations indicated amorphous characteristics for as-deposited films and the crystallized δ-Sb and AgSbTe2 phases for annealed films. The transition temperature of sheet resistance is around 150-160 °C, which is lower than the crystallization temperature obtained by differential scanning calorimetry.",

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year = "2007",

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AU - Chou, Chien Chih

AU - Hung, Fei Yi

AU - Lui, Truan Sheng

PY - 2007/6

Y1 - 2007/6

N2 - AgInSbTe film was deposited on alkali-free glass using the radio-frequency sputtering method. Variations in sheet resistance with annealing temperatures were accompanied by the crystallization of amorphous films. Grazing-incidence X-ray diffractometer and transmission electron microscopy observations indicated amorphous characteristics for as-deposited films and the crystallized δ-Sb and AgSbTe2 phases for annealed films. The transition temperature of sheet resistance is around 150-160 °C, which is lower than the crystallization temperature obtained by differential scanning calorimetry.

AB - AgInSbTe film was deposited on alkali-free glass using the radio-frequency sputtering method. Variations in sheet resistance with annealing temperatures were accompanied by the crystallization of amorphous films. Grazing-incidence X-ray diffractometer and transmission electron microscopy observations indicated amorphous characteristics for as-deposited films and the crystallized δ-Sb and AgSbTe2 phases for annealed films. The transition temperature of sheet resistance is around 150-160 °C, which is lower than the crystallization temperature obtained by differential scanning calorimetry.

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UR - https://www.scopus.com/pages/publications/34247157712#tab=citedBy

U2 - 10.1016/j.scriptamat.2007.02.005

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M3 - Article

AN - SCOPUS:34247157712

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VL - 56

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JO - Scripta Materialia

JF - Scripta Materialia

IS - 12

ER -

Role of crystallized phases in sheet resistance of amorphous AgInSbTe chalcogenide film

Abstract

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