TY - JOUR
T1 - Role of phase transformation in possible wear mechanisms in silicon microelectromechanical-system devices
AU - Liu, Fan Wei
AU - Kung, Jennifer
AU - Kuo, Jui Chao
AU - Liu, Bernard Haochih
AU - Chueh, Yu Lun
N1 - Funding Information:
Financial support for experiments was provided by the Industrial Technology Research Institute Grant No. A-4-0-7-EM-2110 and the Ministry of Science and Technology of Taiwan under Grant No. 106-2628-E-006 -001 -MY3 , 100-2628-E-006-004 .
Publisher Copyright:
© 2020 Elsevier B.V.
Copyright:
Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2020/4/15
Y1 - 2020/4/15
N2 - Wear on microelectromechanical-system (MEMS)/nanoelectromechanical-system (NEMS) devices is an inevitable and critical issue. It reduces the lifespan of the device and increases the failure rate. In this study, an atomic force microscope (AFM) was used to investigate wear mechanisms and to devise precautions against wear. AFM made it possible to demonstrate the operational behaviors of MEMS/NEMS silicon-based devices. It was found that the dynamic tip–sample interaction process induces phase transformation of the silicon tip apart from the conventional wear mechanisms. This weakens the mechanical strength of the tip and promotes wear. Evidence of phase transformation in probe tips during scanning was found, and the possibility of the phase-transformation path was also investigated. In addition, the distribution of stress in AFM probe tips with applied force was simulated. Worn probe tips were analyzed based on the Kikuchi patterns, and then high pressure was applied on monocrystalline silicon to determine the possible phase-transformation path. The results provided useful insights into wear mechanisms in silicon-based MEMS devices.
AB - Wear on microelectromechanical-system (MEMS)/nanoelectromechanical-system (NEMS) devices is an inevitable and critical issue. It reduces the lifespan of the device and increases the failure rate. In this study, an atomic force microscope (AFM) was used to investigate wear mechanisms and to devise precautions against wear. AFM made it possible to demonstrate the operational behaviors of MEMS/NEMS silicon-based devices. It was found that the dynamic tip–sample interaction process induces phase transformation of the silicon tip apart from the conventional wear mechanisms. This weakens the mechanical strength of the tip and promotes wear. Evidence of phase transformation in probe tips during scanning was found, and the possibility of the phase-transformation path was also investigated. In addition, the distribution of stress in AFM probe tips with applied force was simulated. Worn probe tips were analyzed based on the Kikuchi patterns, and then high pressure was applied on monocrystalline silicon to determine the possible phase-transformation path. The results provided useful insights into wear mechanisms in silicon-based MEMS devices.
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U2 - 10.1016/j.matchemphys.2020.122765
DO - 10.1016/j.matchemphys.2020.122765
M3 - Article
AN - SCOPUS:85079056001
SN - 0254-0584
VL - 245
JO - Materials Chemistry and Physics
JF - Materials Chemistry and Physics
M1 - 122765
ER -