Roller-based laser-assisted direct imprinting for large-area and continuous nano-fabrication

Yung-Chun Lee, Cheng Yu Chiu, Chun Hsiang Chen, Jen Hui Tsai

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

This paper presents an innovative approach for large-area and continuous nano-fabrication on silicon substrates based on laser-assisted direct imprinting (LADI) method, which utilizes a pulsed laser for direct forming nano-structures on a substrate from a quartz mold. The key point is to introduce a quartz roller in this LADI process. The quartz roller optically focuses an incident laser beam into a line and mechanically creates a concentrated pressure distribution along the laser focusing line. With properly chosen laser fluence and contact pressure, nano-structures are fabricated at area around the focusing line. By moving the mold/substrate and triggering the laser pulses continuously, the whole surface features of the quartz mold can be transferred to the substrate in a fast, direct, and continuous way. Experimental testing of this roller-based LADI process has been carried out successfully, and it demonstrates several significant improvements and advantages over conventional planar-type LADI. Potential applications of this roller-based LADI for nano-patterning and nano-fabrication will be addressed.

Original languageEnglish
Pages (from-to)35-40
Number of pages6
JournalMicroelectronic Engineering
Volume87
Issue number1
DOIs
Publication statusPublished - 2010 Jan 1

Fingerprint

rollers
nanofabrication
Nanotechnology
Quartz
Lasers
lasers
quartz
Substrates
Silicon
Pulsed lasers
Pressure distribution
Laser beams
pressure distribution
Laser pulses
pulsed lasers
fluence
laser beams
Testing
silicon
pulses

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this

Lee, Yung-Chun ; Chiu, Cheng Yu ; Chen, Chun Hsiang ; Tsai, Jen Hui. / Roller-based laser-assisted direct imprinting for large-area and continuous nano-fabrication. In: Microelectronic Engineering. 2010 ; Vol. 87, No. 1. pp. 35-40.
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Roller-based laser-assisted direct imprinting for large-area and continuous nano-fabrication. / Lee, Yung-Chun; Chiu, Cheng Yu; Chen, Chun Hsiang; Tsai, Jen Hui.

In: Microelectronic Engineering, Vol. 87, No. 1, 01.01.2010, p. 35-40.

Research output: Contribution to journalArticle

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