Roller-based laser assisted direct imprinting for nanofabrication

Yung Chun Lee, Chun Hsiang Chen, Cheng Yu Chiu, Shuo Hung Chang, Fuh Yu Chang, Hung Yi Lin, Wen Lang Lai

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

This paper reports an improved nanofabrication method based on laser-assisted direct imprinting (LADI) technology. The key element in this improvement is to introduce a quartz roller into the LADI process. The quartz roller optically focuses an incident UV laser light into a line onto a silicon substrate, and mechanically compresses a quartz mold against the silicon substrate. Under the action of both laser melting and mechanical pressure, the mold can imprint into the silicon and transfer the mold's surface features directly to the silicon substrate. This roller-type LADI approach has several significant advantages as compared to the original planar type LADI. It transforms the LADI process into a large-area, continuous, and high throughput nano-fabrication method. Experimental tests in this work demonstrate the direct fabrication of nano-structures of 500 nm line width with an imprinting speed of 5 × 60 mm2 per minute in a continuous configuration.

Original languageEnglish
Title of host publication3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
Pages296-299
Number of pages4
DOIs
Publication statusPublished - 2008 Sep 1
Event3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008 - Sanya, China
Duration: 2008 Jan 62008 Jan 9

Publication series

Name3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS

Other

Other3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008
CountryChina
CitySanya
Period08-01-0608-01-09

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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  • Cite this

    Lee, Y. C., Chen, C. H., Chiu, C. Y., Chang, S. H., Chang, F. Y., Lin, H. Y., & Lai, W. L. (2008). Roller-based laser assisted direct imprinting for nanofabrication. In 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2008 (pp. 296-299). [4484339] (3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS). https://doi.org/10.1109/NEMS.2008.4484339