Room-temperature Fabrication of Amorphous IGZO TFTs with Co-sputtered ZrxSi1-xO2 Gate Dielectrics

Pang Yi Liu, Shui-Jinn Wang, Chien Hsiung Hung, Chien Hung Wu, Nai Sheng Wu, Yen Hao-Ping , Tseng Hsing Lin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publication2016 International Conference on Solid State Devices and Materials (SSDM’16)
Place of PublicationTsukuba, Japan
Publication statusPublished - 2016 Sep 26

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