TY - GEN
T1 - Scaling study of nanowire and multi-gate MOSFETs
AU - Chen, Chin Yu
AU - Liao, Yi Bo
AU - Chiang, Meng-Hsueh
PY - 2008/12/1
Y1 - 2008/12/1
N2 - In this paper, comprehensive comparisons of nanowire and multi-gate nMOSFETs in scaling capability using three-dimensional numerical simulations are presented. Their short channel effects and device performances are also investigated. The nanowire device requires less device dimension constraint on body diameter due to perfect surrounding gate-to-gate capacitive coupling and hence it is promising at sub-45 nm node.
AB - In this paper, comprehensive comparisons of nanowire and multi-gate nMOSFETs in scaling capability using three-dimensional numerical simulations are presented. Their short channel effects and device performances are also investigated. The nanowire device requires less device dimension constraint on body diameter due to perfect surrounding gate-to-gate capacitive coupling and hence it is promising at sub-45 nm node.
UR - https://www.scopus.com/pages/publications/60649088932
UR - https://www.scopus.com/pages/publications/60649088932#tab=citedBy
U2 - 10.1109/ICSICT.2008.4734462
DO - 10.1109/ICSICT.2008.4734462
M3 - Conference contribution
AN - SCOPUS:60649088932
SN - 9781424421855
T3 - International Conference on Solid-State and Integrated Circuits Technology Proceedings, ICSICT
SP - 57
EP - 60
BT - ICSICT 2008 - 2008 9th International Conference on Solid-State and Integrated-Circuit Technology Proceedings
T2 - 2008 9th International Conference on Solid-State and Integrated-Circuit Technology, ICSICT 2008
Y2 - 20 October 2008 through 23 October 2008
ER -