TY - JOUR
T1 - Selective Growth of Patterned Monolayer Gold Nanoparticles on SU-8 through Photoreduction for Plasmonic Applications
AU - Chen, Yi Jui
AU - Chang, Wen Huei
AU - Lin, Chun Hung
N1 - Funding Information:
This study was supported by the Ministry of Science and Technology (MOST) of Taiwan under the grant nos. MOST 108-2221-E-006-206-, MOST 109-2221-E-006-206-, and MOST 109-2635-H-153-001-. The authors thank the Center for Micro/Nano Science and Technology at National Cheng Kung University and Taiwan Semiconductor Research Institute for providing equipment and technical support.
Publisher Copyright:
© 2020 American Chemical Society.
Copyright:
Copyright 2021 Elsevier B.V., All rights reserved.
PY - 2021/1/22
Y1 - 2021/1/22
N2 - This paper presents a simple approach for the selective growth of patterned monolayer gold nanoparticles (AuNPs) and bulk gold nanostructures through photoreduction. Photoreduction can occur on the surface of SU-8 but not on the surface of poly(methyl methacrylate) (PMMA). Therefore, a PMMA mask was introduced to the SU-8 surface to confine the area for AuNP production. We developed a residual layer-free nanotransfer printing process to transfer the PMMA mask from a perfluoropolyether mold onto the SU-8 surface. After the exposure of a drop of HAuCl4 over the SU-8 surface masked by PMMA to UV light, AuNPs formed on the uncovered SU-8 surface. Gold nanostructures with various shapes, including nanodisks, nanorings, nanorod dimers, and asymmetric U-shaped split-ring resonators, were produced through the proposed approach. The optical properties of the fabricated nanostructures were investigated and found to be consistent with the simulation. Overall, this study provides a reliable and predictable process for fabricating gold nanostructures with various shapes, which can be beneficial for plasmonic applications.
AB - This paper presents a simple approach for the selective growth of patterned monolayer gold nanoparticles (AuNPs) and bulk gold nanostructures through photoreduction. Photoreduction can occur on the surface of SU-8 but not on the surface of poly(methyl methacrylate) (PMMA). Therefore, a PMMA mask was introduced to the SU-8 surface to confine the area for AuNP production. We developed a residual layer-free nanotransfer printing process to transfer the PMMA mask from a perfluoropolyether mold onto the SU-8 surface. After the exposure of a drop of HAuCl4 over the SU-8 surface masked by PMMA to UV light, AuNPs formed on the uncovered SU-8 surface. Gold nanostructures with various shapes, including nanodisks, nanorings, nanorod dimers, and asymmetric U-shaped split-ring resonators, were produced through the proposed approach. The optical properties of the fabricated nanostructures were investigated and found to be consistent with the simulation. Overall, this study provides a reliable and predictable process for fabricating gold nanostructures with various shapes, which can be beneficial for plasmonic applications.
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U2 - 10.1021/acsanm.0c02544
DO - 10.1021/acsanm.0c02544
M3 - Article
AN - SCOPUS:85099175808
VL - 4
SP - 229
EP - 235
JO - ACS Applied Nano Materials
JF - ACS Applied Nano Materials
SN - 2574-0970
IS - 1
ER -