Self-assembled alternating nano-scaled layers

Wan Yu Wu, Jyh Ming Ting

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports the use of a conventional sputter deposition technique to produce self-assembled alternating nano-scaled layers consisting of diamond-like carbon (DLC) and metal. A conventional sputter deposition technique produces alternating layers only when multiple sputtering targets are employed. However, we have successfully demonstrated that the use of only one single sputtering gun in a conventional sputter deposition process could lead to the formation of alternating nano-scaled layers through self-assembling. The microstructure of the alternating layers was examined as a function of the deposition parameters.

Original languageEnglish
Title of host publication2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004
PublisherNano Science and Technology Institute
Pages448-451
Number of pages4
ISBN (Print)0972842276, 9780972842273
Publication statusPublished - 2004 Jan 1
Event2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004 - Boston, MA, United States
Duration: 2004 Mar 72004 Mar 11

Publication series

Name2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004
Volume3

Other

Other2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004
CountryUnited States
CityBoston, MA
Period04-03-0704-03-11

    Fingerprint

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Wu, W. Y., & Ting, J. M. (2004). Self-assembled alternating nano-scaled layers. In 2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004 (pp. 448-451). (2004 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2004; Vol. 3). Nano Science and Technology Institute.