Self-assembled alternating nano-scaled layers of carbon and metal

Wan Yu Wu, Jyh Ming Ting

Research output: Contribution to journalArticle

27 Citations (Scopus)

Abstract

Conventional sputter deposition techniques produce alternating layers only when multiple sputtering targets are employed. However, we have demonstrated that the use of only one single sputtering gun in a conventional sputter deposition process could lead to the formation of alternating layers through self-assembling. The periodicities of the layered structure range from 10 0 to 101 nm. The appearance of alternating nano-scaled layers and the periodicity depend on the type of the target materials and the deposition conditions. Based on the consideration of the deposition rate and the catalytic reaction of metal, the formation such self-assembled alternating nano-scaled layers is explained.

Original languageEnglish
Pages (from-to)312-315
Number of pages4
JournalChemical Physics Letters
Volume388
Issue number4-6
DOIs
Publication statusPublished - 2004 Apr 21

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)
  • Physical and Theoretical Chemistry

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