Self-assembled Zn/ZnO dots on silicon by RF magnetron sputter

Yu Han Liang; Chuan Pu Liu

doi:10.1109/IMNC.2007.4456152

Self-assembled Zn/ZnO dots on silicon by RF magnetron sputter

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC
Pages	158-159
Number of pages	2
DOIs	https://doi.org/10.1109/IMNC.2007.4456152
Publication status	Published - 2007
Event	s20th International Microprocesses and Nanotechnology Conference, MNC 2007 - Kyoto, Japan Duration: 2007 Nov 5 → 2007 Nov 8

Publication series

Name	Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

Other

Other	s20th International Microprocesses and Nanotechnology Conference, MNC 2007
Country/Territory	Japan
City	Kyoto
Period	07-11-05 → 07-11-08

All Science Journal Classification (ASJC) codes

Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/IMNC.2007.4456152

Cite this

Liang, Y. H., & Liu, C. P. (2007). Self-assembled Zn/ZnO dots on silicon by RF magnetron sputter. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC (pp. 158-159). Article 4456152 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). https://doi.org/10.1109/IMNC.2007.4456152

Liang, Yu Han ; Liu, Chuan Pu. / Self-assembled Zn/ZnO dots on silicon by RF magnetron sputter. Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. pp. 158-159 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC).

@inproceedings{8bf3ec4ccee545829a78d01ac466350d,

title = "Self-assembled Zn/ZnO dots on silicon by RF magnetron sputter",

author = "Liang, {Yu Han} and Liu, {Chuan Pu}",

year = "2007",

doi = "10.1109/IMNC.2007.4456152",

language = "English",

isbn = "4990247248",

series = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",

pages = "158--159",

booktitle = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",

note = "s20th International Microprocesses and Nanotechnology Conference, MNC 2007 ; Conference date: 05-11-2007 Through 08-11-2007",

}

Liang, YH & Liu, CP 2007, Self-assembled Zn/ZnO dots on silicon by RF magnetron sputter. in Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC., 4456152, Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC, pp. 158-159, s20th International Microprocesses and Nanotechnology Conference, MNC 2007, Kyoto, Japan, 07-11-05. https://doi.org/10.1109/IMNC.2007.4456152

Self-assembled Zn/ZnO dots on silicon by RF magnetron sputter. / Liang, Yu Han; Liu, Chuan Pu.
Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 158-159 4456152 (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Self-assembled Zn/ZnO dots on silicon by RF magnetron sputter

AU - Liang, Yu Han

AU - Liu, Chuan Pu

PY - 2007

Y1 - 2007

UR - http://www.scopus.com/inward/record.url?scp=47349110021&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=47349110021&partnerID=8YFLogxK

U2 - 10.1109/IMNC.2007.4456152

DO - 10.1109/IMNC.2007.4456152

M3 - Conference contribution

AN - SCOPUS:47349110021

SN - 4990247248

SN - 9784990247249

T3 - Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

SP - 158

EP - 159

BT - Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

T2 - s20th International Microprocesses and Nanotechnology Conference, MNC 2007

Y2 - 5 November 2007 through 8 November 2007

ER -

Liang YH, Liu CP. Self-assembled Zn/ZnO dots on silicon by RF magnetron sputter. In Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC. 2007. p. 158-159. 4456152. (Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC). doi: 10.1109/IMNC.2007.4456152

Self-assembled Zn/ZnO dots on silicon by RF magnetron sputter

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