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Self-forming AlOx layer as Cu diffusion barrier on porous low-k film

  • Dung Ching Perng
  • , Jia Bin Yeh
  • , Kuo Chung Hsu
  • , Shuo Wen Tsai

Research output: Contribution to journal › Article › peer-review

21   Link opens in a new tab Citations (Scopus)

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