Self-organized nanoscale multilayer growth during the deposition of hyperthermal species

Hayo Zutz, Inga Gerhards, Carsten Ronning, Hans Hofsäss, Michael Seibt, Wan Yu Wu, Jyh-Ming Ting

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)


The quasi-simultaneous deposition of low energy-mass-selected C+ and either Au+ or Fe+ ions resulted in the formation of alternately metal-rich and metal-deficient layers in an amorphous carbon matrix with periods in the nm range. The metal-rich layers consist of densely distributed crystalline particles while the metal-deficient layers are amorphous or contain only smaller numbers of crystalline clusters. A similar structure was found in films grown by reactive dc-magnetron sputtering of Cu, Pt, and Ni targets in an Ar/CH4 plasma. The multilayer formation can be described by an interplay of sputtering, surface segregation, ion induced diffusion, and the stability of small clusters against ion bombardment.

Original languageEnglish
Pages (from-to)241-246
Number of pages6
JournalReviews on Advanced Materials Science
Issue number3
Publication statusPublished - 2007 Nov 1

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics


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