Self-organized tantalum oxide nanopyramidal arrays for antireflective structure

Chia Tien Wu, Fu Hsiang Ko, Chun Hung Lin

Research output: Contribution to journalArticle

31 Citations (Scopus)

Abstract

A self-organized tantalum oxide nanopyramidal structure without tedious semiconductor processing is proposed in this letter. Construction of pyramid arrays with a close-packed periodicity of 200 nm and a height of 200 nm was achieved by the anodic alumina template method directly on the substrate. The tantalum oxide nanopyramidal structure was formed as the underlying tantalum film oxidized and localized precisely by the pore of alumina. The reflectance from the spectroscopic measurement suggests that the nanopyramidal array structures have more broadband antireflection (<2%) than the nanodot arrays and thin film structures.

Original languageEnglish
Article number171911
JournalApplied Physics Letters
Volume90
Issue number17
DOIs
Publication statusPublished - 2007 May 21

Fingerprint

tantalum oxides
aluminum oxides
tantalum
pyramids
periodic variations
templates
broadband
porosity
reflectance
thin films

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

Cite this

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Self-organized tantalum oxide nanopyramidal arrays for antireflective structure. / Wu, Chia Tien; Ko, Fu Hsiang; Lin, Chun Hung.

In: Applied Physics Letters, Vol. 90, No. 17, 171911, 21.05.2007.

Research output: Contribution to journalArticle

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