Self-organized tantalum oxide nanopyramidal arrays for antireflective structure

Chia Tien Wu; Fu Hsiang Ko; Chun Hung Lin

doi:10.1063/1.2731659

Self-organized tantalum oxide nanopyramidal arrays for antireflective structure

Chia Tien Wu, Fu Hsiang Ko, Chun Hung Lin

Department of Photonics

Research output: Contribution to journal › Article

31 Citations (Scopus)

Abstract

A self-organized tantalum oxide nanopyramidal structure without tedious semiconductor processing is proposed in this letter. Construction of pyramid arrays with a close-packed periodicity of 200 nm and a height of 200 nm was achieved by the anodic alumina template method directly on the substrate. The tantalum oxide nanopyramidal structure was formed as the underlying tantalum film oxidized and localized precisely by the pore of alumina. The reflectance from the spectroscopic measurement suggests that the nanopyramidal array structures have more broadband antireflection (<2%) than the nanodot arrays and thin film structures.

Original language	English
Article number	171911
Journal	Applied Physics Letters
Volume	90
Issue number	17
DOIs	https://doi.org/10.1063/1.2731659
Publication status	Published - 2007 May 21

Fingerprint

tantalum oxides

aluminum oxides

tantalum

pyramids

periodic variations

templates

broadband

porosity

reflectance

thin films

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

Cite this

Wu, C. T., Ko, F. H., & Lin, C. H. (2007). Self-organized tantalum oxide nanopyramidal arrays for antireflective structure. Applied Physics Letters, 90(17), [171911]. https://doi.org/10.1063/1.2731659

Wu, Chia Tien ; Ko, Fu Hsiang ; Lin, Chun Hung. / Self-organized tantalum oxide nanopyramidal arrays for antireflective structure. In: Applied Physics Letters. 2007 ; Vol. 90, No. 17.

@article{f23397d9aa884c3ab2ccc8576da3c138,

title = "Self-organized tantalum oxide nanopyramidal arrays for antireflective structure",

abstract = "A self-organized tantalum oxide nanopyramidal structure without tedious semiconductor processing is proposed in this letter. Construction of pyramid arrays with a close-packed periodicity of 200 nm and a height of 200 nm was achieved by the anodic alumina template method directly on the substrate. The tantalum oxide nanopyramidal structure was formed as the underlying tantalum film oxidized and localized precisely by the pore of alumina. The reflectance from the spectroscopic measurement suggests that the nanopyramidal array structures have more broadband antireflection (<2{\%}) than the nanodot arrays and thin film structures.",

author = "Wu, {Chia Tien} and Ko, {Fu Hsiang} and Lin, {Chun Hung}",

year = "2007",

month = "5",

day = "21",

doi = "10.1063/1.2731659",

language = "English",

volume = "90",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "17",

}

Wu, CT, Ko, FH & Lin, CH 2007, 'Self-organized tantalum oxide nanopyramidal arrays for antireflective structure', Applied Physics Letters, vol. 90, no. 17, 171911. https://doi.org/10.1063/1.2731659

Self-organized tantalum oxide nanopyramidal arrays for antireflective structure. / Wu, Chia Tien; Ko, Fu Hsiang; Lin, Chun Hung.

In: Applied Physics Letters, Vol. 90, No. 17, 171911, 21.05.2007.

Research output: Contribution to journal › Article

TY - JOUR

T1 - Self-organized tantalum oxide nanopyramidal arrays for antireflective structure

AU - Wu, Chia Tien

AU - Ko, Fu Hsiang

AU - Lin, Chun Hung

PY - 2007/5/21

Y1 - 2007/5/21

N2 - A self-organized tantalum oxide nanopyramidal structure without tedious semiconductor processing is proposed in this letter. Construction of pyramid arrays with a close-packed periodicity of 200 nm and a height of 200 nm was achieved by the anodic alumina template method directly on the substrate. The tantalum oxide nanopyramidal structure was formed as the underlying tantalum film oxidized and localized precisely by the pore of alumina. The reflectance from the spectroscopic measurement suggests that the nanopyramidal array structures have more broadband antireflection (<2%) than the nanodot arrays and thin film structures.

AB - A self-organized tantalum oxide nanopyramidal structure without tedious semiconductor processing is proposed in this letter. Construction of pyramid arrays with a close-packed periodicity of 200 nm and a height of 200 nm was achieved by the anodic alumina template method directly on the substrate. The tantalum oxide nanopyramidal structure was formed as the underlying tantalum film oxidized and localized precisely by the pore of alumina. The reflectance from the spectroscopic measurement suggests that the nanopyramidal array structures have more broadband antireflection (<2%) than the nanodot arrays and thin film structures.

UR - http://www.scopus.com/inward/record.url?scp=34248572010&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=34248572010&partnerID=8YFLogxK

U2 - 10.1063/1.2731659

DO - 10.1063/1.2731659

M3 - Article

AN - SCOPUS:34248572010

VL - 90

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 17

M1 - 171911

ER -

Wu CT, Ko FH, Lin CH. Self-organized tantalum oxide nanopyramidal arrays for antireflective structure. Applied Physics Letters. 2007 May 21;90(17). 171911. https://doi.org/10.1063/1.2731659

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10.1063/1.2731659