Self-powered hybrid humidity sensor and dual-band UV photodetector fabricated on back-contact photovoltaic cell

Y. M. Juan, Shoou-Jinn Chang, H. T. Hsueh, T. C. Chen, S. W. Huang, Y. H. Lee, T. J. Hsueh, Chung-Lin Wu

Research output: Contribution to journalArticlepeer-review

21 Citations (Scopus)

Abstract

Self-powered multi-functional sensors were fabricated by integrating a crystalline Si interdigitated back-contact (IBC) photovoltaic (PV) cell with a vertically stacked structure into a single chip. The IBC PV cell was vertically connected with a humidity sensor and a photodetector (PD) in parallel. The measured humidity current of the WO3 thin-film humidity sensor increased monotonically when the relative humidity was increased from 30% to 95%. In addition, the humidity characteristics of the unannealed WO3 thin-film humidity sensor were better than those of the annealed samples. The cutoff wavelengths of WO3 and Ga2O3 thin-film PDs were around 370 and 250 nm, respectively. The measured responsivity of WO3 and Ga2O3 thin-film PDs at the cutoff wavelength were 1.7 × 10-7 and 9.8 × 10-7 A/W, respectively, under 1-sun illumination.

Original languageEnglish
Pages (from-to)43-49
Number of pages7
JournalSensors and Actuators, B: Chemical
Volume219
DOIs
Publication statusPublished - 2015 May 28

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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