Self-powered hybrid humidity sensor and dual-band UV photodetector fabricated on back-contact photovoltaic cell

Y. M. Juan; S. J. Chang; H. T. Hsueh; T. C. Chen; S. W. Huang; Y. H. Lee; T. J. Hsueh; C. L. Wu

doi:10.1016/j.snb.2015.05.020

Self-powered hybrid humidity sensor and dual-band UV photodetector fabricated on back-contact photovoltaic cell

Y. M. Juan, S. J. Chang, H. T. Hsueh, T. C. Chen, S. W. Huang, Y. H. Lee, T. J. Hsueh, C. L. Wu

Research output: Contribution to journal › Article › peer-review

41 Citations (Scopus)

Abstract

Self-powered multi-functional sensors were fabricated by integrating a crystalline Si interdigitated back-contact (IBC) photovoltaic (PV) cell with a vertically stacked structure into a single chip. The IBC PV cell was vertically connected with a humidity sensor and a photodetector (PD) in parallel. The measured humidity current of the WO₃ thin-film humidity sensor increased monotonically when the relative humidity was increased from 30% to 95%. In addition, the humidity characteristics of the unannealed WO₃ thin-film humidity sensor were better than those of the annealed samples. The cutoff wavelengths of WO₃ and Ga₂O₃ thin-film PDs were around 370 and 250 nm, respectively. The measured responsivity of WO₃ and Ga₂O₃ thin-film PDs at the cutoff wavelength were 1.7 × 10^-7 and 9.8 × 10^-7 A/W, respectively, under 1-sun illumination.

Original language	English
Pages (from-to)	43-49
Number of pages	7
Journal	Sensors and Actuators, B: Chemical
Volume	219
DOIs	https://doi.org/10.1016/j.snb.2015.05.020
Publication status	Published - 2015 May 28

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering
Materials Chemistry

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1016/j.snb.2015.05.020

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@article{9170ae9544ad4403827192a24448cec2,

title = "Self-powered hybrid humidity sensor and dual-band UV photodetector fabricated on back-contact photovoltaic cell",

abstract = "Self-powered multi-functional sensors were fabricated by integrating a crystalline Si interdigitated back-contact (IBC) photovoltaic (PV) cell with a vertically stacked structure into a single chip. The IBC PV cell was vertically connected with a humidity sensor and a photodetector (PD) in parallel. The measured humidity current of the WO3 thin-film humidity sensor increased monotonically when the relative humidity was increased from 30% to 95%. In addition, the humidity characteristics of the unannealed WO3 thin-film humidity sensor were better than those of the annealed samples. The cutoff wavelengths of WO3 and Ga2O3 thin-film PDs were around 370 and 250 nm, respectively. The measured responsivity of WO3 and Ga2O3 thin-film PDs at the cutoff wavelength were 1.7 × 10-7 and 9.8 × 10-7 A/W, respectively, under 1-sun illumination.",

author = "Juan, {Y. M.} and Chang, {S. J.} and Hsueh, {H. T.} and Chen, {T. C.} and Huang, {S. W.} and Lee, {Y. H.} and Hsueh, {T. J.} and Wu, {C. L.}",

year = "2015",

month = may,

day = "28",

doi = "10.1016/j.snb.2015.05.020",

language = "English",

volume = "219",

pages = "43--49",

journal = "Sensors and Actuators, B: Chemical",

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T1 - Self-powered hybrid humidity sensor and dual-band UV photodetector fabricated on back-contact photovoltaic cell

AU - Juan, Y. M.

AU - Chang, S. J.

AU - Hsueh, H. T.

AU - Chen, T. C.

AU - Huang, S. W.

AU - Lee, Y. H.

AU - Hsueh, T. J.

AU - Wu, C. L.

PY - 2015/5/28

Y1 - 2015/5/28

N2 - Self-powered multi-functional sensors were fabricated by integrating a crystalline Si interdigitated back-contact (IBC) photovoltaic (PV) cell with a vertically stacked structure into a single chip. The IBC PV cell was vertically connected with a humidity sensor and a photodetector (PD) in parallel. The measured humidity current of the WO3 thin-film humidity sensor increased monotonically when the relative humidity was increased from 30% to 95%. In addition, the humidity characteristics of the unannealed WO3 thin-film humidity sensor were better than those of the annealed samples. The cutoff wavelengths of WO3 and Ga2O3 thin-film PDs were around 370 and 250 nm, respectively. The measured responsivity of WO3 and Ga2O3 thin-film PDs at the cutoff wavelength were 1.7 × 10-7 and 9.8 × 10-7 A/W, respectively, under 1-sun illumination.

AB - Self-powered multi-functional sensors were fabricated by integrating a crystalline Si interdigitated back-contact (IBC) photovoltaic (PV) cell with a vertically stacked structure into a single chip. The IBC PV cell was vertically connected with a humidity sensor and a photodetector (PD) in parallel. The measured humidity current of the WO3 thin-film humidity sensor increased monotonically when the relative humidity was increased from 30% to 95%. In addition, the humidity characteristics of the unannealed WO3 thin-film humidity sensor were better than those of the annealed samples. The cutoff wavelengths of WO3 and Ga2O3 thin-film PDs were around 370 and 250 nm, respectively. The measured responsivity of WO3 and Ga2O3 thin-film PDs at the cutoff wavelength were 1.7 × 10-7 and 9.8 × 10-7 A/W, respectively, under 1-sun illumination.

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DO - 10.1016/j.snb.2015.05.020

M3 - Article

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SN - 0925-4005

VL - 219

SP - 43

EP - 49

JO - Sensors and Actuators, B: Chemical

JF - Sensors and Actuators, B: Chemical

ER -

Self-powered hybrid humidity sensor and dual-band UV photodetector fabricated on back-contact photovoltaic cell

Abstract

All Science Journal Classification (ASJC) codes

UN SDGs

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