Semicondutor diode capable of detecting hydrogen at high temperatures

Wen-Chau Liu (Inventor)

Research output: Patent

Abstract

一種適用於高溫操作之氫氣感測器及其製法,此氫氣感測器結構成長在半絕緣型半導體基板上,其磊晶結構包含未摻雜之砷化鎵半導體緩衝層,以及n型磷化銦鎵半導體薄膜。.
Translated title of the contribution適用於高溫操作之氫氣感測器及其製法
Original languageEnglish
Patent number195317
Publication statusPublished - 1800

Cite this