Abstract
一種適用於高溫操作之氫氣感測器及其製法,此氫氣感測器結構成長在半絕緣型半導體基板上,其磊晶結構包含未摻雜之砷化鎵半導體緩衝層,以及n型磷化銦鎵半導體薄膜。.
Translated title of the contribution | 適用於高溫操作之氫氣感測器及其製法 |
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Original language | English |
Patent number | 195317 |
Publication status | Published - 1800 |
Wen-Chau Liu (Inventor)
Research output: Patent
Translated title of the contribution | 適用於高溫操作之氫氣感測器及其製法 |
---|---|
Original language | English |
Patent number | 195317 |
Publication status | Published - 1800 |