Shape effect of torsional resonance mode AFM cantilevers operated in fluids

Bernard Haochih Liu, Sheng Kai Chuang, Allison Lowai Huang

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

Nanoscale resolution, high scanning rate, and non-destructive measurement are highly desirable attributes for imagining living cells in fluids. Torsional resonance (TR) mode is a promising approach that can satisfy these requirements. In this study, we have fabricated scanning probes with suitable cantilever designs for use in TR mode in fluids, using computer simulation as an aid in the design and fabrication iterations. Several geometrical parameters of cantilevers were considered and simulated for mechanical properties and dynamic characteristics, and selected designs were fabricated for performance evaluation. The influences of design parameters on scan performance were investigated by statistical analysis. Based on this approach, we designed and fabricated optimal cantilevers that can be operated in TR mode in water with high quality (Q) factor (∼60), high resonance frequency (∼240 kHz), and low spring constant (∼0.14 N m-1). Overall, O-shape cantilevers have demonstrated superior Q factors to typical rectangular shape, A-shape and V-shape designs.

Original languageEnglish
Article numbere035003
Pages (from-to)V
JournalSurface Topography: Metrology and Properties
Volume2
Issue number3
DOIs
Publication statusPublished - 2014 Jul 1

Fingerprint

atomic force microscopy
Fluids
fluids
Q factors
Scanning
scanning
statistical analysis
dynamic characteristics
iteration
Statistical methods
computerized simulation
Cells
mechanical properties
Fabrication
Mechanical properties
requirements
fabrication
Water
evaluation
probes

All Science Journal Classification (ASJC) codes

  • Process Chemistry and Technology
  • Instrumentation
  • Materials Chemistry
  • Surfaces, Coatings and Films

Cite this

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abstract = "Nanoscale resolution, high scanning rate, and non-destructive measurement are highly desirable attributes for imagining living cells in fluids. Torsional resonance (TR) mode is a promising approach that can satisfy these requirements. In this study, we have fabricated scanning probes with suitable cantilever designs for use in TR mode in fluids, using computer simulation as an aid in the design and fabrication iterations. Several geometrical parameters of cantilevers were considered and simulated for mechanical properties and dynamic characteristics, and selected designs were fabricated for performance evaluation. The influences of design parameters on scan performance were investigated by statistical analysis. Based on this approach, we designed and fabricated optimal cantilevers that can be operated in TR mode in water with high quality (Q) factor (∼60), high resonance frequency (∼240 kHz), and low spring constant (∼0.14 N m-1). Overall, O-shape cantilevers have demonstrated superior Q factors to typical rectangular shape, A-shape and V-shape designs.",
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Shape effect of torsional resonance mode AFM cantilevers operated in fluids. / Liu, Bernard Haochih; Chuang, Sheng Kai; Huang, Allison Lowai.

In: Surface Topography: Metrology and Properties, Vol. 2, No. 3, e035003, 01.07.2014, p. V.

Research output: Contribution to journalArticle

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AB - Nanoscale resolution, high scanning rate, and non-destructive measurement are highly desirable attributes for imagining living cells in fluids. Torsional resonance (TR) mode is a promising approach that can satisfy these requirements. In this study, we have fabricated scanning probes with suitable cantilever designs for use in TR mode in fluids, using computer simulation as an aid in the design and fabrication iterations. Several geometrical parameters of cantilevers were considered and simulated for mechanical properties and dynamic characteristics, and selected designs were fabricated for performance evaluation. The influences of design parameters on scan performance were investigated by statistical analysis. Based on this approach, we designed and fabricated optimal cantilevers that can be operated in TR mode in water with high quality (Q) factor (∼60), high resonance frequency (∼240 kHz), and low spring constant (∼0.14 N m-1). Overall, O-shape cantilevers have demonstrated superior Q factors to typical rectangular shape, A-shape and V-shape designs.

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