Si nanocrystals embedded in Si suboxide matrix grown by laser-assisted chemical vapor deposition at room temperature

Ching Ting Lee, Chun Hung Lin

Research output: Contribution to journalArticle

8 Citations (Scopus)

Abstract

We present a novel laser-assisted chemical vapor deposition (LACVD) system for growing Si nanocrystals embedded in a Si suboxide matrix at room temperature. Varying growth gas ratio caused the observed photoluminescence (PL) light emission to vary from 1.65 eV to 1.92 eV without post-annealing. A phase-separated model and PL measurements were used to identify Si nanocrystals embedded in Si suboxides.

Original languageEnglish
Pages (from-to)2793-2794
Number of pages2
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume43
Issue number5 A
DOIs
Publication statusPublished - 2004 May

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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