Signal analysis of apertureless scanning near-field optical microscopy with super-lens

C. H. Chuang, Yu-Lung Lo

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

Apertureless scanning near-field optical microscopy (A-SNOM) with a superlens is a novel nano-optical system for sub-wavelength imaging purposes. This study presents a quantitative model for analyzing the heterodyne signals obtained from an A-SNOM fitted with a superlens at various harmonics of the AFM tip vibration frequency. It is shown that the image resolution is determined not only by the tip radius, but also by the superlens transmission coefficient in the high evanescent wave vector Kx. Moreover, the analytical results show that the images acquired from the A-SNOM/superlens system are adversely affected by a signal contrast problem as a result of the noise generated by the tip-superlens interaction electric field. However, it is shown that this problem can be easily resolved using a background noise compensation method, thereby resulting in a significant improvement in the signal-to-background (S/B) ratio. The feasibility of utilizing the system for maskless nanolithography applications is discussed. It is shown that the A-SNOM/superlens system in nanolithography yields a dramatic improvement in the signal intensity and S/B ratio compared to that of a conventional A-SNOM with a bare tip only.

Original languageEnglish
Pages (from-to)83-106
Number of pages24
JournalProgress in Electromagnetics Research
Volume109
DOIs
Publication statusPublished - 2010 Jan 1

Fingerprint

Near field scanning optical microscopy
signal analysis
Signal analysis
Lenses
near fields
lenses
microscopy
scanning
Nanolithography
evanescent waves
image resolution
background noise
Image resolution
Optical systems
Electric fields
atomic force microscopy
harmonics
Imaging techniques
Wavelength
vibration

All Science Journal Classification (ASJC) codes

  • Radiation
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

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Signal analysis of apertureless scanning near-field optical microscopy with super-lens. / Chuang, C. H.; Lo, Yu-Lung.

In: Progress in Electromagnetics Research, Vol. 109, 01.01.2010, p. 83-106.

Research output: Contribution to journalArticle

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