Silicon germanium FinFET device physics, process integration and modeling considerations (invited)

Darsen Lu, Pierre Morin, Bhagawan Sahu, Terence B. Hook, Pouya Hashemi, Andreas Scholze, Bomsoo Kim, Pranita Kerber, Ali Khakifirooz, Phil Oldiges, Ken Rim, Bruce Doris

Research output: Contribution to journalConference articlepeer-review

11 Citations (Scopus)

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Engineering & Materials Science