Abstract
This study focuses on the design, simulation, fabrication, and test of the in-plane microgenerator to obtain a high-power output. The microgenerator comprises multilayer planar silver (Ag) microcoil of lowtemperature cofired ceramics (LTCC) and multipole hard magnet of Nd/Fe/B (neodymium, iron, and boron). The LTCC process is an approach that saves costs and time to fabricate the microcoil. The multipole hard magnet of Nd/Fe/B provides the large magnetic energy product to contribute to the power. Finite element simulations have been carried out using COMSOL Multiphysics® to observe electromagnetic information. The induced voltages of coils in different basic geometric shapes, including square-shaped coils, circle-shaped coils, and sector-shaped coils, are simulated separately in this study. A prototype of the microgenerator is <1 cm3 in volume size. The simulated result can be compared to the experimental one. The results of simulation reveal that this microgenerator with a sector-shaped microcoil generates a maximum effective value of the induced voltage of 232.7 mV and the power of 2.5 mW. And the 1-μm gap between the microcoil and the magnet achieved is the value that is mentioned above. Experimental measurement shows close agreement with finite element simulations.
| Original language | English |
|---|---|
| Article number | 031304 |
| Journal | Journal of Micro/Nanolithography, MEMS, and MOEMS |
| Volume | 8 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 2009 Jan 1 |
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All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering
Cite this
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Simulation and analysis of electromagnetic in-plane microgenerator. / Pan, C. T.; Chen, Y. J.; Shen, S. C.
In: Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 8, No. 3, 031304, 01.01.2009.Research output: Contribution to journal › Article
TY - JOUR
T1 - Simulation and analysis of electromagnetic in-plane microgenerator
AU - Pan, C. T.
AU - Chen, Y. J.
AU - Shen, S. C.
PY - 2009/1/1
Y1 - 2009/1/1
N2 - This study focuses on the design, simulation, fabrication, and test of the in-plane microgenerator to obtain a high-power output. The microgenerator comprises multilayer planar silver (Ag) microcoil of lowtemperature cofired ceramics (LTCC) and multipole hard magnet of Nd/Fe/B (neodymium, iron, and boron). The LTCC process is an approach that saves costs and time to fabricate the microcoil. The multipole hard magnet of Nd/Fe/B provides the large magnetic energy product to contribute to the power. Finite element simulations have been carried out using COMSOL Multiphysics® to observe electromagnetic information. The induced voltages of coils in different basic geometric shapes, including square-shaped coils, circle-shaped coils, and sector-shaped coils, are simulated separately in this study. A prototype of the microgenerator is <1 cm3 in volume size. The simulated result can be compared to the experimental one. The results of simulation reveal that this microgenerator with a sector-shaped microcoil generates a maximum effective value of the induced voltage of 232.7 mV and the power of 2.5 mW. And the 1-μm gap between the microcoil and the magnet achieved is the value that is mentioned above. Experimental measurement shows close agreement with finite element simulations.
AB - This study focuses on the design, simulation, fabrication, and test of the in-plane microgenerator to obtain a high-power output. The microgenerator comprises multilayer planar silver (Ag) microcoil of lowtemperature cofired ceramics (LTCC) and multipole hard magnet of Nd/Fe/B (neodymium, iron, and boron). The LTCC process is an approach that saves costs and time to fabricate the microcoil. The multipole hard magnet of Nd/Fe/B provides the large magnetic energy product to contribute to the power. Finite element simulations have been carried out using COMSOL Multiphysics® to observe electromagnetic information. The induced voltages of coils in different basic geometric shapes, including square-shaped coils, circle-shaped coils, and sector-shaped coils, are simulated separately in this study. A prototype of the microgenerator is <1 cm3 in volume size. The simulated result can be compared to the experimental one. The results of simulation reveal that this microgenerator with a sector-shaped microcoil generates a maximum effective value of the induced voltage of 232.7 mV and the power of 2.5 mW. And the 1-μm gap between the microcoil and the magnet achieved is the value that is mentioned above. Experimental measurement shows close agreement with finite element simulations.
UR - http://www.scopus.com/inward/record.url?scp=80055116868&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=80055116868&partnerID=8YFLogxK
U2 - 10.1117/1.3152363
DO - 10.1117/1.3152363
M3 - Article
AN - SCOPUS:80055116868
VL - 8
JO - Journal of Micro/ Nanolithography, MEMS, and MOEMS
JF - Journal of Micro/ Nanolithography, MEMS, and MOEMS
SN - 1932-5150
IS - 3
M1 - 031304
ER -