Simulation and characterization of a high-sensitive micro-opto-mechanical Microphone

H. Gao, C. H. Huang, W. Westerveld, R. Haouari, B. Troia, F. Verhaegen, R. Jansen, B. Figeys, X. Rottenberg, V. Rochus

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

Micro-opto-mechanical Microphone (MOMM) based on integrated optical Mach-Zehnder interferometers (MZI) are promising for future application in medical environments. However, the design of next generation MOMM systems on chip remains challenging due to the intrinsic multi-physics characteristics related to acoustic, mechanical, optical and electrical effects. We therefore developed a methodology composed of acoustic, mechanic, optical, and electronic sections for fast design of high performance MOMM systems. The feasibility has been demonstrated as the operational characteristics of the fabricated MOMM (i.e. resonance frequency, dynamic range, the sensitivity and SNR) align well with the measured references.

Original languageEnglish
Title of host publication2018 19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2018
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1-4
Number of pages4
ISBN (Electronic)9781538623596
DOIs
Publication statusPublished - 2018 May 30
Event19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2018 - Toulouse, France
Duration: 2018 Apr 152018 Apr 18

Publication series

Name2018 19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2018

Other

Other19th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2018
CountryFrance
CityToulouse
Period18-04-1518-04-18

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Fluid Flow and Transfer Processes
  • Electrical and Electronic Engineering
  • Safety, Risk, Reliability and Quality
  • Modelling and Simulation
  • Mechanical Engineering

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