Simulation and characterization of a high-sensitive micro-opto-mechanical Microphone

H. Gao, C. H. Huang, W. Westerveld, R. Haouari, B. Troia, F. Verhaegen, R. Jansen, B. Figeys, X. Rottenberg, V. Rochus

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

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