Simulation based study of oxygen plasma induced defects on zigzag graphene nanoribbons

Po An Chen, Jia Wei Lee, Meng-Hsueh Chiang, Wei-Chou Hsu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

As the 2D materials are being developed for the era of the internet of things, a complete solution of integrated circuits including electronics devices and interconnects is needed. This work investigates the design issues and insights of the graphene interconnects with the defects stemming from oxygen plasma etching. The density functional theory and non-equilibrium Green’s function are used for simulations to investigate how the carrier transport mechanism is affected by the defects, including edge-roughness, oxygen-on-edge, and sp3-type cases. Design techniques to relieve the impact of defects are also provided.

Original languageEnglish
Title of host publicationECS Transactions
EditorsS. Bhansali, S. Brankovic, D. A. Buttry, D. Chu, H. Imahori, H. Katayama, O. Leonte, S. Mukerjee, R. Mukundan, Y. Oren, L. Romankiw, N. Sharma, A. Simonian, P. C. Trulove, J. T. Vaughey, M. Winter, P. N. Bartlett, V. Di Noto, M. Doeff, T. Druffel, J. M. Fenton, J. Fergus, Y. Fukunaka, M. Itagaki, J. Koehne, R. Kostecki, R. P. Lynch, I. Milosev, S. R. Narayan, V. Subramanian, T. Tatsuma, N. Wu, Z. Chen, L. M. Haverhals, P. Hesketh, A. C. Hillier, M. Inaba, G. Krumdick, J. Leddy, M. Manivannan, V. Maurice, S. Mitra, J. Muldoon, J. Noel, K. Rajeshwar, V. R. Subramanian, A. H. Suroviec, K. Suto, G. Zangari, P. Allongue, N. Birbilis, O. V. Boltalina, S. Calabrese Barton, V. Chaitanya, D. Chidambaram, J. K. Hite, J. J. Lee, R. A. Mantz, J. Mauzeroll, S. D. Minteer, M. E. Orazem, R. P. Ramasamy, D. P. Riemer, D. Roeper, M. Rohwerder, M. J. Sailor, D. T. Schwartz, J. A. Staser, G. Wu, H. Xu, R. Alkire, T. J. Anderson, M. Bayachou, A. B. Bocarsly, J. W. Choi, M. Innocenti, S. H. Kilgore, D. J. Kim, P. J. Kulesza, Y. C. Lu, P. Marcus, M. Mauter, J. D. Nicholas, S. Pylypenko, C. Rhodes, L. Soleymani, M. Tao, Y. Xing, A. P. Abbott, B. A. Chin, D. E. Cliffel, E. A. Douglas, K. Edstrom, H. Hamada, H. N. McMurray, Y. S. Meng, E. L. Miller, M. Navaei, S. S. Nonnenmann, C. O'Dwyer, P. Pharkya, S. V. Rotkin, J. L. M. Rupp, G. Williams, C. Bock, R. Buchheit, G. T. Cheek, H. Deligianni, C. Johnson, J. G. Park, P. N. Pintauro, K. C. Smith, P. Vanysek, H. Wang, J. F. Whitacre, J. Xiao, M. T. Carter, N. Dimitrov, J. Fransaer, D. Guyomard, B. L. Lucht, L. Nagahara, P. M. Natishan, P. K. Sekhar, D. K. Smith, G. R. Stafford, K. B. Sundaram, N. Vasiljevic, S. Virtanen, W. Wang, D. L. Wood, J. J. Yang
PublisherElectrochemical Society Inc.
Pages463-471
Number of pages9
Edition10
ISBN (Electronic)9781607685395
DOIs
Publication statusPublished - 2017 Jan 1
Event232nd ECS Meeting - National Harbor, United States
Duration: 2017 Oct 12017 Oct 5

Publication series

NameECS Transactions
Number10
Volume80
ISSN (Print)1938-6737
ISSN (Electronic)1938-5862

Other

Other232nd ECS Meeting
CountryUnited States
CityNational Harbor
Period17-10-0117-10-05

Fingerprint

Nanoribbons
Graphene
Plasmas
Defects
Oxygen
Carrier transport
Plasma etching
Green's function
Density functional theory
Integrated circuits
Electronic equipment
Surface roughness

All Science Journal Classification (ASJC) codes

  • Engineering(all)

Cite this

Chen, P. A., Lee, J. W., Chiang, M-H., & Hsu, W-C. (2017). Simulation based study of oxygen plasma induced defects on zigzag graphene nanoribbons. In S. Bhansali, S. Brankovic, D. A. Buttry, D. Chu, H. Imahori, H. Katayama, O. Leonte, S. Mukerjee, R. Mukundan, Y. Oren, L. Romankiw, N. Sharma, A. Simonian, P. C. Trulove, J. T. Vaughey, M. Winter, P. N. Bartlett, V. Di Noto, M. Doeff, T. Druffel, J. M. Fenton, J. Fergus, Y. Fukunaka, M. Itagaki, J. Koehne, R. Kostecki, R. P. Lynch, I. Milosev, S. R. Narayan, V. Subramanian, T. Tatsuma, N. Wu, Z. Chen, L. M. Haverhals, P. Hesketh, A. C. Hillier, M. Inaba, G. Krumdick, J. Leddy, M. Manivannan, V. Maurice, S. Mitra, J. Muldoon, J. Noel, K. Rajeshwar, V. R. Subramanian, A. H. Suroviec, K. Suto, G. Zangari, P. Allongue, N. Birbilis, O. V. Boltalina, S. Calabrese Barton, V. Chaitanya, D. Chidambaram, J. K. Hite, J. J. Lee, R. A. Mantz, J. Mauzeroll, S. D. Minteer, M. E. Orazem, R. P. Ramasamy, D. P. Riemer, D. Roeper, M. Rohwerder, M. J. Sailor, D. T. Schwartz, J. A. Staser, G. Wu, H. Xu, R. Alkire, T. J. Anderson, M. Bayachou, A. B. Bocarsly, J. W. Choi, M. Innocenti, S. H. Kilgore, D. J. Kim, P. J. Kulesza, Y. C. Lu, P. Marcus, M. Mauter, J. D. Nicholas, S. Pylypenko, C. Rhodes, L. Soleymani, M. Tao, Y. Xing, A. P. Abbott, B. A. Chin, D. E. Cliffel, E. A. Douglas, K. Edstrom, H. Hamada, H. N. McMurray, Y. S. Meng, E. L. Miller, M. Navaei, S. S. Nonnenmann, C. O'Dwyer, P. Pharkya, S. V. Rotkin, J. L. M. Rupp, G. Williams, C. Bock, R. Buchheit, G. T. Cheek, H. Deligianni, C. Johnson, J. G. Park, P. N. Pintauro, K. C. Smith, P. Vanysek, H. Wang, J. F. Whitacre, J. Xiao, M. T. Carter, N. Dimitrov, J. Fransaer, D. Guyomard, B. L. Lucht, L. Nagahara, P. M. Natishan, P. K. Sekhar, D. K. Smith, G. R. Stafford, K. B. Sundaram, N. Vasiljevic, S. Virtanen, W. Wang, D. L. Wood, ... J. J. Yang (Eds.), ECS Transactions (10 ed., pp. 463-471). (ECS Transactions; Vol. 80, No. 10). Electrochemical Society Inc.. https://doi.org/10.1149/08010.0463ecst
Chen, Po An ; Lee, Jia Wei ; Chiang, Meng-Hsueh ; Hsu, Wei-Chou. / Simulation based study of oxygen plasma induced defects on zigzag graphene nanoribbons. ECS Transactions. editor / S. Bhansali ; S. Brankovic ; D. A. Buttry ; D. Chu ; H. Imahori ; H. Katayama ; O. Leonte ; S. Mukerjee ; R. Mukundan ; Y. Oren ; L. Romankiw ; N. Sharma ; A. Simonian ; P. C. Trulove ; J. T. Vaughey ; M. Winter ; P. N. Bartlett ; V. Di Noto ; M. Doeff ; T. Druffel ; J. M. Fenton ; J. Fergus ; Y. Fukunaka ; M. Itagaki ; J. Koehne ; R. Kostecki ; R. P. Lynch ; I. Milosev ; S. R. Narayan ; V. Subramanian ; T. Tatsuma ; N. Wu ; Z. Chen ; L. M. Haverhals ; P. Hesketh ; A. C. Hillier ; M. Inaba ; G. Krumdick ; J. Leddy ; M. Manivannan ; V. Maurice ; S. Mitra ; J. Muldoon ; J. Noel ; K. Rajeshwar ; V. R. Subramanian ; A. H. Suroviec ; K. Suto ; G. Zangari ; P. Allongue ; N. Birbilis ; O. V. Boltalina ; S. Calabrese Barton ; V. Chaitanya ; D. Chidambaram ; J. K. Hite ; J. J. Lee ; R. A. Mantz ; J. Mauzeroll ; S. D. Minteer ; M. E. Orazem ; R. P. Ramasamy ; D. P. Riemer ; D. Roeper ; M. Rohwerder ; M. J. Sailor ; D. T. Schwartz ; J. A. Staser ; G. Wu ; H. Xu ; R. Alkire ; T. J. Anderson ; M. Bayachou ; A. B. Bocarsly ; J. W. Choi ; M. Innocenti ; S. H. Kilgore ; D. J. Kim ; P. J. Kulesza ; Y. C. Lu ; P. Marcus ; M. Mauter ; J. D. Nicholas ; S. Pylypenko ; C. Rhodes ; L. Soleymani ; M. Tao ; Y. Xing ; A. P. Abbott ; B. A. Chin ; D. E. Cliffel ; E. A. Douglas ; K. Edstrom ; H. Hamada ; H. N. McMurray ; Y. S. Meng ; E. L. Miller ; M. Navaei ; S. S. Nonnenmann ; C. O'Dwyer ; P. Pharkya ; S. V. Rotkin ; J. L. M. Rupp ; G. Williams ; C. Bock ; R. Buchheit ; G. T. Cheek ; H. Deligianni ; C. Johnson ; J. G. Park ; P. N. Pintauro ; K. C. Smith ; P. Vanysek ; H. Wang ; J. F. Whitacre ; J. Xiao ; M. T. Carter ; N. Dimitrov ; J. Fransaer ; D. Guyomard ; B. L. Lucht ; L. Nagahara ; P. M. Natishan ; P. K. Sekhar ; D. K. Smith ; G. R. Stafford ; K. B. Sundaram ; N. Vasiljevic ; S. Virtanen ; W. Wang ; D. L. Wood ; J. J. Yang. 10. ed. Electrochemical Society Inc., 2017. pp. 463-471 (ECS Transactions; 10).
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abstract = "As the 2D materials are being developed for the era of the internet of things, a complete solution of integrated circuits including electronics devices and interconnects is needed. This work investigates the design issues and insights of the graphene interconnects with the defects stemming from oxygen plasma etching. The density functional theory and non-equilibrium Green’s function are used for simulations to investigate how the carrier transport mechanism is affected by the defects, including edge-roughness, oxygen-on-edge, and sp3-type cases. Design techniques to relieve the impact of defects are also provided.",
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Chen, PA, Lee, JW, Chiang, M-H & Hsu, W-C 2017, Simulation based study of oxygen plasma induced defects on zigzag graphene nanoribbons. in S Bhansali, S Brankovic, DA Buttry, D Chu, H Imahori, H Katayama, O Leonte, S Mukerjee, R Mukundan, Y Oren, L Romankiw, N Sharma, A Simonian, PC Trulove, JT Vaughey, M Winter, PN Bartlett, V Di Noto, M Doeff, T Druffel, JM Fenton, J Fergus, Y Fukunaka, M Itagaki, J Koehne, R Kostecki, RP Lynch, I Milosev, SR Narayan, V Subramanian, T Tatsuma, N Wu, Z Chen, LM Haverhals, P Hesketh, AC Hillier, M Inaba, G Krumdick, J Leddy, M Manivannan, V Maurice, S Mitra, J Muldoon, J Noel, K Rajeshwar, VR Subramanian, AH Suroviec, K Suto, G Zangari, P Allongue, N Birbilis, OV Boltalina, S Calabrese Barton, V Chaitanya, D Chidambaram, JK Hite, JJ Lee, RA Mantz, J Mauzeroll, SD Minteer, ME Orazem, RP Ramasamy, DP Riemer, D Roeper, M Rohwerder, MJ Sailor, DT Schwartz, JA Staser, G Wu, H Xu, R Alkire, TJ Anderson, M Bayachou, AB Bocarsly, JW Choi, M Innocenti, SH Kilgore, DJ Kim, PJ Kulesza, YC Lu, P Marcus, M Mauter, JD Nicholas, S Pylypenko, C Rhodes, L Soleymani, M Tao, Y Xing, AP Abbott, BA Chin, DE Cliffel, EA Douglas, K Edstrom, H Hamada, HN McMurray, YS Meng, EL Miller, M Navaei, SS Nonnenmann, C O'Dwyer, P Pharkya, SV Rotkin, JLM Rupp, G Williams, C Bock, R Buchheit, GT Cheek, H Deligianni, C Johnson, JG Park, PN Pintauro, KC Smith, P Vanysek, H Wang, JF Whitacre, J Xiao, MT Carter, N Dimitrov, J Fransaer, D Guyomard, BL Lucht, L Nagahara, PM Natishan, PK Sekhar, DK Smith, GR Stafford, KB Sundaram, N Vasiljevic, S Virtanen, W Wang, DL Wood & JJ Yang (eds), ECS Transactions. 10 edn, ECS Transactions, no. 10, vol. 80, Electrochemical Society Inc., pp. 463-471, 232nd ECS Meeting, National Harbor, United States, 17-10-01. https://doi.org/10.1149/08010.0463ecst

Simulation based study of oxygen plasma induced defects on zigzag graphene nanoribbons. / Chen, Po An; Lee, Jia Wei; Chiang, Meng-Hsueh; Hsu, Wei-Chou.

ECS Transactions. ed. / S. Bhansali; S. Brankovic; D. A. Buttry; D. Chu; H. Imahori; H. Katayama; O. Leonte; S. Mukerjee; R. Mukundan; Y. Oren; L. Romankiw; N. Sharma; A. Simonian; P. C. Trulove; J. T. Vaughey; M. Winter; P. N. Bartlett; V. Di Noto; M. Doeff; T. Druffel; J. M. Fenton; J. Fergus; Y. Fukunaka; M. Itagaki; J. Koehne; R. Kostecki; R. P. Lynch; I. Milosev; S. R. Narayan; V. Subramanian; T. Tatsuma; N. Wu; Z. Chen; L. M. Haverhals; P. Hesketh; A. C. Hillier; M. Inaba; G. Krumdick; J. Leddy; M. Manivannan; V. Maurice; S. Mitra; J. Muldoon; J. Noel; K. Rajeshwar; V. R. Subramanian; A. H. Suroviec; K. Suto; G. Zangari; P. Allongue; N. Birbilis; O. V. Boltalina; S. Calabrese Barton; V. Chaitanya; D. Chidambaram; J. K. Hite; J. J. Lee; R. A. Mantz; J. Mauzeroll; S. D. Minteer; M. E. Orazem; R. P. Ramasamy; D. P. Riemer; D. Roeper; M. Rohwerder; M. J. Sailor; D. T. Schwartz; J. A. Staser; G. Wu; H. Xu; R. Alkire; T. J. Anderson; M. Bayachou; A. B. Bocarsly; J. W. Choi; M. Innocenti; S. H. Kilgore; D. J. Kim; P. J. Kulesza; Y. C. Lu; P. Marcus; M. Mauter; J. D. Nicholas; S. Pylypenko; C. Rhodes; L. Soleymani; M. Tao; Y. Xing; A. P. Abbott; B. A. Chin; D. E. Cliffel; E. A. Douglas; K. Edstrom; H. Hamada; H. N. McMurray; Y. S. Meng; E. L. Miller; M. Navaei; S. S. Nonnenmann; C. O'Dwyer; P. Pharkya; S. V. Rotkin; J. L. M. Rupp; G. Williams; C. Bock; R. Buchheit; G. T. Cheek; H. Deligianni; C. Johnson; J. G. Park; P. N. Pintauro; K. C. Smith; P. Vanysek; H. Wang; J. F. Whitacre; J. Xiao; M. T. Carter; N. Dimitrov; J. Fransaer; D. Guyomard; B. L. Lucht; L. Nagahara; P. M. Natishan; P. K. Sekhar; D. K. Smith; G. R. Stafford; K. B. Sundaram; N. Vasiljevic; S. Virtanen; W. Wang; D. L. Wood; J. J. Yang. 10. ed. Electrochemical Society Inc., 2017. p. 463-471 (ECS Transactions; Vol. 80, No. 10).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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T1 - Simulation based study of oxygen plasma induced defects on zigzag graphene nanoribbons

AU - Chen, Po An

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N2 - As the 2D materials are being developed for the era of the internet of things, a complete solution of integrated circuits including electronics devices and interconnects is needed. This work investigates the design issues and insights of the graphene interconnects with the defects stemming from oxygen plasma etching. The density functional theory and non-equilibrium Green’s function are used for simulations to investigate how the carrier transport mechanism is affected by the defects, including edge-roughness, oxygen-on-edge, and sp3-type cases. Design techniques to relieve the impact of defects are also provided.

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A2 - Bhansali, S.

A2 - Brankovic, S.

A2 - Buttry, D. A.

A2 - Chu, D.

A2 - Imahori, H.

A2 - Katayama, H.

A2 - Leonte, O.

A2 - Mukerjee, S.

A2 - Mukundan, R.

A2 - Oren, Y.

A2 - Romankiw, L.

A2 - Sharma, N.

A2 - Simonian, A.

A2 - Trulove, P. C.

A2 - Vaughey, J. T.

A2 - Winter, M.

A2 - Bartlett, P. N.

A2 - Di Noto, V.

A2 - Doeff, M.

A2 - Druffel, T.

A2 - Fenton, J. M.

A2 - Fergus, J.

A2 - Fukunaka, Y.

A2 - Itagaki, M.

A2 - Koehne, J.

A2 - Kostecki, R.

A2 - Lynch, R. P.

A2 - Milosev, I.

A2 - Narayan, S. R.

A2 - Subramanian, V.

A2 - Tatsuma, T.

A2 - Wu, N.

A2 - Chen, Z.

A2 - Haverhals, L. M.

A2 - Hesketh, P.

A2 - Hillier, A. C.

A2 - Inaba, M.

A2 - Krumdick, G.

A2 - Leddy, J.

A2 - Manivannan, M.

A2 - Maurice, V.

A2 - Mitra, S.

A2 - Muldoon, J.

A2 - Noel, J.

A2 - Rajeshwar, K.

A2 - Subramanian, V. R.

A2 - Suroviec, A. H.

A2 - Suto, K.

A2 - Zangari, G.

A2 - Allongue, P.

A2 - Birbilis, N.

A2 - Boltalina, O. V.

A2 - Calabrese Barton, S.

A2 - Chaitanya, V.

A2 - Chidambaram, D.

A2 - Hite, J. K.

A2 - Lee, J. J.

A2 - Mantz, R. A.

A2 - Mauzeroll, J.

A2 - Minteer, S. D.

A2 - Orazem, M. E.

A2 - Ramasamy, R. P.

A2 - Riemer, D. P.

A2 - Roeper, D.

A2 - Rohwerder, M.

A2 - Sailor, M. J.

A2 - Schwartz, D. T.

A2 - Staser, J. A.

A2 - Wu, G.

A2 - Xu, H.

A2 - Alkire, R.

A2 - Anderson, T. J.

A2 - Bayachou, M.

A2 - Bocarsly, A. B.

A2 - Choi, J. W.

A2 - Innocenti, M.

A2 - Kilgore, S. H.

A2 - Kim, D. J.

A2 - Kulesza, P. J.

A2 - Lu, Y. C.

A2 - Marcus, P.

A2 - Mauter, M.

A2 - Nicholas, J. D.

A2 - Pylypenko, S.

A2 - Rhodes, C.

A2 - Soleymani, L.

A2 - Tao, M.

A2 - Xing, Y.

A2 - Abbott, A. P.

A2 - Chin, B. A.

A2 - Cliffel, D. E.

A2 - Douglas, E. A.

A2 - Edstrom, K.

A2 - Hamada, H.

A2 - McMurray, H. N.

A2 - Meng, Y. S.

A2 - Miller, E. L.

A2 - Navaei, M.

A2 - Nonnenmann, S. S.

A2 - O'Dwyer, C.

A2 - Pharkya, P.

A2 - Rotkin, S. V.

A2 - Rupp, J. L. M.

A2 - Williams, G.

A2 - Bock, C.

A2 - Buchheit, R.

A2 - Cheek, G. T.

A2 - Deligianni, H.

A2 - Johnson, C.

A2 - Park, J. G.

A2 - Pintauro, P. N.

A2 - Smith, K. C.

A2 - Vanysek, P.

A2 - Wang, H.

A2 - Whitacre, J. F.

A2 - Xiao, J.

A2 - Carter, M. T.

A2 - Dimitrov, N.

A2 - Fransaer, J.

A2 - Guyomard, D.

A2 - Lucht, B. L.

A2 - Nagahara, L.

A2 - Natishan, P. M.

A2 - Sekhar, P. K.

A2 - Smith, D. K.

A2 - Stafford, G. R.

A2 - Sundaram, K. B.

A2 - Vasiljevic, N.

A2 - Virtanen, S.

A2 - Wang, W.

A2 - Wood, D. L.

A2 - Yang, J. J.

PB - Electrochemical Society Inc.

ER -

Chen PA, Lee JW, Chiang M-H, Hsu W-C. Simulation based study of oxygen plasma induced defects on zigzag graphene nanoribbons. In Bhansali S, Brankovic S, Buttry DA, Chu D, Imahori H, Katayama H, Leonte O, Mukerjee S, Mukundan R, Oren Y, Romankiw L, Sharma N, Simonian A, Trulove PC, Vaughey JT, Winter M, Bartlett PN, Di Noto V, Doeff M, Druffel T, Fenton JM, Fergus J, Fukunaka Y, Itagaki M, Koehne J, Kostecki R, Lynch RP, Milosev I, Narayan SR, Subramanian V, Tatsuma T, Wu N, Chen Z, Haverhals LM, Hesketh P, Hillier AC, Inaba M, Krumdick G, Leddy J, Manivannan M, Maurice V, Mitra S, Muldoon J, Noel J, Rajeshwar K, Subramanian VR, Suroviec AH, Suto K, Zangari G, Allongue P, Birbilis N, Boltalina OV, Calabrese Barton S, Chaitanya V, Chidambaram D, Hite JK, Lee JJ, Mantz RA, Mauzeroll J, Minteer SD, Orazem ME, Ramasamy RP, Riemer DP, Roeper D, Rohwerder M, Sailor MJ, Schwartz DT, Staser JA, Wu G, Xu H, Alkire R, Anderson TJ, Bayachou M, Bocarsly AB, Choi JW, Innocenti M, Kilgore SH, Kim DJ, Kulesza PJ, Lu YC, Marcus P, Mauter M, Nicholas JD, Pylypenko S, Rhodes C, Soleymani L, Tao M, Xing Y, Abbott AP, Chin BA, Cliffel DE, Douglas EA, Edstrom K, Hamada H, McMurray HN, Meng YS, Miller EL, Navaei M, Nonnenmann SS, O'Dwyer C, Pharkya P, Rotkin SV, Rupp JLM, Williams G, Bock C, Buchheit R, Cheek GT, Deligianni H, Johnson C, Park JG, Pintauro PN, Smith KC, Vanysek P, Wang H, Whitacre JF, Xiao J, Carter MT, Dimitrov N, Fransaer J, Guyomard D, Lucht BL, Nagahara L, Natishan PM, Sekhar PK, Smith DK, Stafford GR, Sundaram KB, Vasiljevic N, Virtanen S, Wang W, Wood DL, Yang JJ, editors, ECS Transactions. 10 ed. Electrochemical Society Inc. 2017. p. 463-471. (ECS Transactions; 10). https://doi.org/10.1149/08010.0463ecst