Abstract
A numerical simulation to predict and analyze the characteristics of microcrystalline silicon thin-film transistors have been proposed. This model is derived from the Poisson's equation, with the consideration of the effect of microcrystal grain size. The microcrystalline silicon acceptor-like state characteristic energies are modified by the change of energy gap. This proposed model conforms fairly well with the experimental data.
| Original language | English |
|---|---|
| Pages (from-to) | 4246-4250 |
| Number of pages | 5 |
| Journal | Japanese Journal of Applied Physics |
| Volume | 36 |
| Issue number | 7 A |
| DOIs | |
| Publication status | Published - 1997 Jul |
All Science Journal Classification (ASJC) codes
- General Engineering
- General Physics and Astronomy