The different focusing structures are simulated by the MAGIC particle-on-cell code cell program. The normal devices without focusing structures are also studied for comparison. The narrow or wide gate width means that the simulated outer gate width does not extend or extends to the simulation boundary. The voltages applied on the cathode electrode, the gate electrode, and the focus electrode are 0, 80, and 0 V, respectively. An anode plate with 4 kV is placed 1 mm away from and parallel to the cathode plate.
|Number of pages||3|
|Journal||Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures|
|Publication status||Published - 2000 Mar 1|
All Science Journal Classification (ASJC) codes
- Condensed Matter Physics
- Electrical and Electronic Engineering