Single-battery-powered CMOS/MEMS respiration detection monolithic chip

Chung Ming Yu, Ming Ke Tsai, Heng Yu Chiu, Chia Ling Wei

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This work proposes a respiration detection monolithic chip, which integrates MEMS sensors, CMOS sensing circuits, an analog-to-digital converter, and three low dropout regulators into a single chip. Hence, this chip can be directly powered by a single Li-ion battery. The proposed chip was designed and fabricated using TSMC 0.35 μm CMOS/MEMS 2P4M mixed-signal polycide process. Moreover, to solve the issue of particle deposition, it tries to cover the proposed chip with a thin and soft layer of polydimethylsiloxane.

Original languageEnglish
Title of host publication2019 IEEE International Symposium on Circuits and Systems, ISCAS 2019 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728103976
DOIs
Publication statusPublished - 2019 Jan 1
Event2019 IEEE International Symposium on Circuits and Systems, ISCAS 2019 - Sapporo, Japan
Duration: 2019 May 262019 May 29

Publication series

NameProceedings - IEEE International Symposium on Circuits and Systems
Volume2019-May
ISSN (Print)0271-4310

Conference

Conference2019 IEEE International Symposium on Circuits and Systems, ISCAS 2019
CountryJapan
CitySapporo
Period19-05-2619-05-29

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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