Single-battery-powered CMOS/MEMS respiration detection monolithic chip

Chung Ming Yu, Ming Ke Tsai, Heng Yu Chiu, Chia-Ling Wei

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This work proposes a respiration detection monolithic chip, which integrates MEMS sensors, CMOS sensing circuits, an analog-to-digital converter, and three low dropout regulators into a single chip. Hence, this chip can be directly powered by a single Li-ion battery. The proposed chip was designed and fabricated using TSMC 0.35 μm CMOS/MEMS 2P4M mixed-signal polycide process. Moreover, to solve the issue of particle deposition, it tries to cover the proposed chip with a thin and soft layer of polydimethylsiloxane.

Original languageEnglish
Title of host publication2019 IEEE International Symposium on Circuits and Systems, ISCAS 2019 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781728103976
DOIs
Publication statusPublished - 2019 Jan 1
Event2019 IEEE International Symposium on Circuits and Systems, ISCAS 2019 - Sapporo, Japan
Duration: 2019 May 262019 May 29

Publication series

NameProceedings - IEEE International Symposium on Circuits and Systems
Volume2019-May
ISSN (Print)0271-4310

Conference

Conference2019 IEEE International Symposium on Circuits and Systems, ISCAS 2019
CountryJapan
CitySapporo
Period19-05-2619-05-29

Fingerprint

MEMS
Polydimethylsiloxane
Digital to analog conversion
Networks (circuits)
Sensors
Lithium-ion batteries

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Yu, C. M., Tsai, M. K., Chiu, H. Y., & Wei, C-L. (2019). Single-battery-powered CMOS/MEMS respiration detection monolithic chip. In 2019 IEEE International Symposium on Circuits and Systems, ISCAS 2019 - Proceedings [8702291] (Proceedings - IEEE International Symposium on Circuits and Systems; Vol. 2019-May). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ISCAS.2019.8702291
Yu, Chung Ming ; Tsai, Ming Ke ; Chiu, Heng Yu ; Wei, Chia-Ling. / Single-battery-powered CMOS/MEMS respiration detection monolithic chip. 2019 IEEE International Symposium on Circuits and Systems, ISCAS 2019 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2019. (Proceedings - IEEE International Symposium on Circuits and Systems).
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title = "Single-battery-powered CMOS/MEMS respiration detection monolithic chip",
abstract = "This work proposes a respiration detection monolithic chip, which integrates MEMS sensors, CMOS sensing circuits, an analog-to-digital converter, and three low dropout regulators into a single chip. Hence, this chip can be directly powered by a single Li-ion battery. The proposed chip was designed and fabricated using TSMC 0.35 μm CMOS/MEMS 2P4M mixed-signal polycide process. Moreover, to solve the issue of particle deposition, it tries to cover the proposed chip with a thin and soft layer of polydimethylsiloxane.",
author = "Yu, {Chung Ming} and Tsai, {Ming Ke} and Chiu, {Heng Yu} and Chia-Ling Wei",
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doi = "10.1109/ISCAS.2019.8702291",
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Yu, CM, Tsai, MK, Chiu, HY & Wei, C-L 2019, Single-battery-powered CMOS/MEMS respiration detection monolithic chip. in 2019 IEEE International Symposium on Circuits and Systems, ISCAS 2019 - Proceedings., 8702291, Proceedings - IEEE International Symposium on Circuits and Systems, vol. 2019-May, Institute of Electrical and Electronics Engineers Inc., 2019 IEEE International Symposium on Circuits and Systems, ISCAS 2019, Sapporo, Japan, 19-05-26. https://doi.org/10.1109/ISCAS.2019.8702291

Single-battery-powered CMOS/MEMS respiration detection monolithic chip. / Yu, Chung Ming; Tsai, Ming Ke; Chiu, Heng Yu; Wei, Chia-Ling.

2019 IEEE International Symposium on Circuits and Systems, ISCAS 2019 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2019. 8702291 (Proceedings - IEEE International Symposium on Circuits and Systems; Vol. 2019-May).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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N2 - This work proposes a respiration detection monolithic chip, which integrates MEMS sensors, CMOS sensing circuits, an analog-to-digital converter, and three low dropout regulators into a single chip. Hence, this chip can be directly powered by a single Li-ion battery. The proposed chip was designed and fabricated using TSMC 0.35 μm CMOS/MEMS 2P4M mixed-signal polycide process. Moreover, to solve the issue of particle deposition, it tries to cover the proposed chip with a thin and soft layer of polydimethylsiloxane.

AB - This work proposes a respiration detection monolithic chip, which integrates MEMS sensors, CMOS sensing circuits, an analog-to-digital converter, and three low dropout regulators into a single chip. Hence, this chip can be directly powered by a single Li-ion battery. The proposed chip was designed and fabricated using TSMC 0.35 μm CMOS/MEMS 2P4M mixed-signal polycide process. Moreover, to solve the issue of particle deposition, it tries to cover the proposed chip with a thin and soft layer of polydimethylsiloxane.

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Yu CM, Tsai MK, Chiu HY, Wei C-L. Single-battery-powered CMOS/MEMS respiration detection monolithic chip. In 2019 IEEE International Symposium on Circuits and Systems, ISCAS 2019 - Proceedings. Institute of Electrical and Electronics Engineers Inc. 2019. 8702291. (Proceedings - IEEE International Symposium on Circuits and Systems). https://doi.org/10.1109/ISCAS.2019.8702291