Abstract
This work proposes a respiration detection monolithic chip, which integrates MEMS sensors, CMOS sensing circuits, an analog-to-digital converter, and three low dropout regulators into a single chip. Hence, this chip can be directly powered by a single Li-ion battery. The proposed chip was designed and fabricated using TSMC 0.35 μm CMOS/MEMS 2P4M mixed-signal polycide process. Moreover, to solve the issue of particle deposition, it tries to cover the proposed chip with a thin and soft layer of polydimethylsiloxane.
| Original language | English |
|---|---|
| Title of host publication | 2019 IEEE International Symposium on Circuits and Systems, ISCAS 2019 - Proceedings |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| ISBN (Electronic) | 9781728103976 |
| DOIs | |
| Publication status | Published - 2019 Jan 1 |
| Event | 2019 IEEE International Symposium on Circuits and Systems, ISCAS 2019 - Sapporo, Japan Duration: 2019 May 26 → 2019 May 29 |
Publication series
| Name | Proceedings - IEEE International Symposium on Circuits and Systems |
|---|---|
| Volume | 2019-May |
| ISSN (Print) | 0271-4310 |
Conference
| Conference | 2019 IEEE International Symposium on Circuits and Systems, ISCAS 2019 |
|---|---|
| Country | Japan |
| City | Sapporo |
| Period | 19-05-26 → 19-05-29 |
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All Science Journal Classification (ASJC) codes
- Electrical and Electronic Engineering
Cite this
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Single-battery-powered CMOS/MEMS respiration detection monolithic chip. / Yu, Chung Ming; Tsai, Ming Ke; Chiu, Heng Yu; Wei, Chia-Ling.
2019 IEEE International Symposium on Circuits and Systems, ISCAS 2019 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2019. 8702291 (Proceedings - IEEE International Symposium on Circuits and Systems; Vol. 2019-May).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
TY - GEN
T1 - Single-battery-powered CMOS/MEMS respiration detection monolithic chip
AU - Yu, Chung Ming
AU - Tsai, Ming Ke
AU - Chiu, Heng Yu
AU - Wei, Chia-Ling
PY - 2019/1/1
Y1 - 2019/1/1
N2 - This work proposes a respiration detection monolithic chip, which integrates MEMS sensors, CMOS sensing circuits, an analog-to-digital converter, and three low dropout regulators into a single chip. Hence, this chip can be directly powered by a single Li-ion battery. The proposed chip was designed and fabricated using TSMC 0.35 μm CMOS/MEMS 2P4M mixed-signal polycide process. Moreover, to solve the issue of particle deposition, it tries to cover the proposed chip with a thin and soft layer of polydimethylsiloxane.
AB - This work proposes a respiration detection monolithic chip, which integrates MEMS sensors, CMOS sensing circuits, an analog-to-digital converter, and three low dropout regulators into a single chip. Hence, this chip can be directly powered by a single Li-ion battery. The proposed chip was designed and fabricated using TSMC 0.35 μm CMOS/MEMS 2P4M mixed-signal polycide process. Moreover, to solve the issue of particle deposition, it tries to cover the proposed chip with a thin and soft layer of polydimethylsiloxane.
UR - http://www.scopus.com/inward/record.url?scp=85066814153&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85066814153&partnerID=8YFLogxK
U2 - 10.1109/ISCAS.2019.8702291
DO - 10.1109/ISCAS.2019.8702291
M3 - Conference contribution
T3 - Proceedings - IEEE International Symposium on Circuits and Systems
BT - 2019 IEEE International Symposium on Circuits and Systems, ISCAS 2019 - Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
ER -