SiNx nanopillars on AlGaInP-based light-emitting diodes to enhance light extraction using self-assembly ZnO nanomask coating by successive ionic layer adsorption and reaction method

S. C. Shei; X. F. Zeng; N. M. Lin; S. J. Chang

doi:10.1016/j.tsf.2014.02.103

SiN_x nanopillars on AlGaInP-based light-emitting diodes to enhance light extraction using self-assembly ZnO nanomask coating by successive ionic layer adsorption and reaction method

S. C. Shei, X. F. Zeng, N. M. Lin, S. J. Chang

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

This study presents a cost-effective method of producing SiN_x nanopillars on the surfaces of AlInGaP-based light-emitting diodes (LEDs) to enhance light extraction using successive ionic layer adsorption and reaction (SILAR). The SILAR-coated ZnO nanoparticles were used as a self-assembly dry etching mask over a SiN_x film during inductively coupled plasma etching. The proposed method provides a control on the density of ZnO nanoparticles. Optimizing the SiN_x nanopillars on the surface of AlInGaP-based LEDs provided a 33.7% increase in light output power, compared to an ordinary flat surface LED, without a significant degradation in electrical properties. The increase in performance can be attributed to a reduction in Fresnel reflection and increased scattering by the addition of SiN_x nanopillars across the emission surface of AlInGaP LEDs.

Original language	English
Pages (from-to)	230-234
Number of pages	5
Journal	Thin Solid Films
Volume	570
Issue number	PB
DOIs	https://doi.org/10.1016/j.tsf.2014.02.103
Publication status	Published - 2014 Nov 3

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/j.tsf.2014.02.103

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@article{39e9f02fd281459383736c925423655c,

title = "SiNx nanopillars on AlGaInP-based light-emitting diodes to enhance light extraction using self-assembly ZnO nanomask coating by successive ionic layer adsorption and reaction method",

abstract = "This study presents a cost-effective method of producing SiNx nanopillars on the surfaces of AlInGaP-based light-emitting diodes (LEDs) to enhance light extraction using successive ionic layer adsorption and reaction (SILAR). The SILAR-coated ZnO nanoparticles were used as a self-assembly dry etching mask over a SiNx film during inductively coupled plasma etching. The proposed method provides a control on the density of ZnO nanoparticles. Optimizing the SiNx nanopillars on the surface of AlInGaP-based LEDs provided a 33.7% increase in light output power, compared to an ordinary flat surface LED, without a significant degradation in electrical properties. The increase in performance can be attributed to a reduction in Fresnel reflection and increased scattering by the addition of SiNx nanopillars across the emission surface of AlInGaP LEDs.",

author = "Shei, {S. C.} and Zeng, {X. F.} and Lin, {N. M.} and Chang, {S. J.}",

note = "Funding Information: This work was supported in part by the Advanced Optoelectronic Technology Center and in part by the Center for Micro/Nano Science and Technology, NCKU , under contract No. 101-D0204-6 project from the Ministry of Education, Taiwan. This work was also supported in part by the National Science Council of Taiwan, under contract no. 101-2622-E-024-002-CC3 and 101-2221-E-024-003-MY3. Publisher Copyright: {\textcopyright} 2014 Elsevier B.V.",

year = "2014",

month = nov,

day = "3",

doi = "10.1016/j.tsf.2014.02.103",

language = "English",

volume = "570",

pages = "230--234",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

number = "PB",

}

TY - JOUR

T1 - SiNx nanopillars on AlGaInP-based light-emitting diodes to enhance light extraction using self-assembly ZnO nanomask coating by successive ionic layer adsorption and reaction method

AU - Shei, S. C.

AU - Zeng, X. F.

AU - Lin, N. M.

AU - Chang, S. J.

N1 - Funding Information: This work was supported in part by the Advanced Optoelectronic Technology Center and in part by the Center for Micro/Nano Science and Technology, NCKU , under contract No. 101-D0204-6 project from the Ministry of Education, Taiwan. This work was also supported in part by the National Science Council of Taiwan, under contract no. 101-2622-E-024-002-CC3 and 101-2221-E-024-003-MY3. Publisher Copyright: © 2014 Elsevier B.V.

PY - 2014/11/3

Y1 - 2014/11/3

N2 - This study presents a cost-effective method of producing SiNx nanopillars on the surfaces of AlInGaP-based light-emitting diodes (LEDs) to enhance light extraction using successive ionic layer adsorption and reaction (SILAR). The SILAR-coated ZnO nanoparticles were used as a self-assembly dry etching mask over a SiNx film during inductively coupled plasma etching. The proposed method provides a control on the density of ZnO nanoparticles. Optimizing the SiNx nanopillars on the surface of AlInGaP-based LEDs provided a 33.7% increase in light output power, compared to an ordinary flat surface LED, without a significant degradation in electrical properties. The increase in performance can be attributed to a reduction in Fresnel reflection and increased scattering by the addition of SiNx nanopillars across the emission surface of AlInGaP LEDs.

AB - This study presents a cost-effective method of producing SiNx nanopillars on the surfaces of AlInGaP-based light-emitting diodes (LEDs) to enhance light extraction using successive ionic layer adsorption and reaction (SILAR). The SILAR-coated ZnO nanoparticles were used as a self-assembly dry etching mask over a SiNx film during inductively coupled plasma etching. The proposed method provides a control on the density of ZnO nanoparticles. Optimizing the SiNx nanopillars on the surface of AlInGaP-based LEDs provided a 33.7% increase in light output power, compared to an ordinary flat surface LED, without a significant degradation in electrical properties. The increase in performance can be attributed to a reduction in Fresnel reflection and increased scattering by the addition of SiNx nanopillars across the emission surface of AlInGaP LEDs.

UR - http://www.scopus.com/inward/record.url?scp=84912029338&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84912029338&partnerID=8YFLogxK

U2 - 10.1016/j.tsf.2014.02.103

DO - 10.1016/j.tsf.2014.02.103

M3 - Article

AN - SCOPUS:84912029338

SN - 0040-6090

VL - 570

SP - 230

EP - 234

JO - Thin Solid Films

JF - Thin Solid Films

IS - PB

ER -

SiN_x nanopillars on AlGaInP-based light-emitting diodes to enhance light extraction using self-assembly ZnO nanomask coating by successive ionic layer adsorption and reaction method

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