This study presents a cost-effective method of producing SiNx nanopillars on the surfaces of AlInGaP-based light-emitting diodes (LEDs) to enhance light extraction using successive ionic layer adsorption and reaction (SILAR). The SILAR-coated ZnO nanoparticles were used as a self-assembly dry etching mask over a SiNx film during inductively coupled plasma etching. The proposed method provides a control on the density of ZnO nanoparticles. Optimizing the SiNx nanopillars on the surface of AlInGaP-based LEDs provided a 33.7% increase in light output power, compared to an ordinary flat surface LED, without a significant degradation in electrical properties. The increase in performance can be attributed to a reduction in Fresnel reflection and increased scattering by the addition of SiNx nanopillars across the emission surface of AlInGaP LEDs.
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Metals and Alloys
- Materials Chemistry