SiNx nanopillars on AlGaInP-based light-emitting diodes to enhance light extraction using self-assembly ZnO nanomask coating by successive ionic layer adsorption and reaction method

S. C. Shei, X. F. Zeng, N. M. Lin, S. J. Chang

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)

Abstract

This study presents a cost-effective method of producing SiNx nanopillars on the surfaces of AlInGaP-based light-emitting diodes (LEDs) to enhance light extraction using successive ionic layer adsorption and reaction (SILAR). The SILAR-coated ZnO nanoparticles were used as a self-assembly dry etching mask over a SiNx film during inductively coupled plasma etching. The proposed method provides a control on the density of ZnO nanoparticles. Optimizing the SiNx nanopillars on the surface of AlInGaP-based LEDs provided a 33.7% increase in light output power, compared to an ordinary flat surface LED, without a significant degradation in electrical properties. The increase in performance can be attributed to a reduction in Fresnel reflection and increased scattering by the addition of SiNx nanopillars across the emission surface of AlInGaP LEDs.

Original languageEnglish
Pages (from-to)230-234
Number of pages5
JournalThin Solid Films
Volume570
Issue numberPB
DOIs
Publication statusPublished - 2014 Nov 3

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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