Abstract
In this paper, an optical measurement system is proposed to measure the six-degree-of-freedom (6DOF) geometrical errors of a linear stage, and the errors are analyzed by the interferometric method and the geometrical optics method. Among them, the interferometric method is mainly used for the position error analysis. This method can solve the problem that geometrical optics is limited by the size of the sensor in our previous system, and improve the measurement accuracy of the position error. The geometrical optics method is used for the error analysis of the remaining 5DOF geometrical errors to simplify the data acquisition time and calculation amount. In addition, this paper also proposes a methodology to compensate for laser beam drifts and installation errors of optical components. We use two sensors to measure the 4DOF laser beam drifts and add them into the proposed mathematical model to solve these errors. We also use sensitivity analysis to analyze the influence of each installation error of optical components and find out the installation errors that need to be considered. Then we bring them into the mathematical model and solved them with least square methods. Finally, we verify the feasibility of the proposed measurement system through repeated experiments and comparisons with a commercial interferometer and an electronic level.
Original language | English |
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Article number | 107407 |
Journal | Optics and Lasers in Engineering |
Volume | 162 |
DOIs | |
Publication status | Published - 2023 Mar |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Mechanical Engineering
- Electrical and Electronic Engineering