Soft magnetic properties of Co-Fe-Zr-B-Al-O films

L. H. Chen, H. K. Chen, C. T. Hsieh, Y. H. Shih, I. G. Chen, S. Y. Chen, H. P. Liu

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Abstract

We have investigated magnetic and electrical properties of amorphous Co-Fe-Zr-B alloy films with Al and O additions, deposited on rotating Si substrates by dc magnetron sputtering. Microstructural characterization carried out on these films shows the amorphous nature of films. The Co-Fe-Zr-B-Al-O films do not exhibit any uniaxial anisotropy in magnetization behavior in the as-deposited condition. However, a strong uniaxial anisotropy is introduced in the film plane by annealing at 200°C for 2 h and in an applied field of ∼150 Oe. The observed in-plane uniaxial anisotropy field (H k) is as high as ∼38 Oe and the easy-axis coercivity is less than 1.5 Oe for the Co-Fe-Zr-B-Al-O film with 7 at.% Al. The ferromagnetic resonance frequency reaches a high value of ∼2.05 GHz, as a result of this large anisotropy field. It is also found that the soft magnetic properties of amorphous films have a strong dependence on the film composition. This is attributed to the change in the microstructure of films, which is closely related to the film composition.

Original languageEnglish
Pages (from-to)8450-8452
Number of pages3
JournalJournal of Applied Physics
Volume91
Issue number10 I
DOIs
Publication statusPublished - 2002 May 15

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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    Chen, L. H., Chen, H. K., Hsieh, C. T., Shih, Y. H., Chen, I. G., Chen, S. Y., & Liu, H. P. (2002). Soft magnetic properties of Co-Fe-Zr-B-Al-O films. Journal of Applied Physics, 91(10 I), 8450-8452. https://doi.org/10.1063/1.1447521