Special section guest editorial

Theory and practice of MEMS, NEMS, and MOEMS

Research output: Contribution to journalEditorial

Original languageEnglish
Article number011501
JournalJournal of Micro/Nanolithography, MEMS, and MOEMS
Volume10
Issue number1
DOIs
Publication statusPublished - 2011 Jan 1

Fingerprint

MOEMS
NEMS
microoptoelectromechanical systems
microelectromechanical systems
MEMS

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Atomic and Molecular Physics, and Optics

Cite this

@article{bd9271aee4ec4f0fad9cf10f28ad5a63,
title = "Special section guest editorial: Theory and practice of MEMS, NEMS, and MOEMS",
author = "Yu-Cheng Lin",
year = "2011",
month = "1",
day = "1",
doi = "10.1117/1.3567190",
language = "English",
volume = "10",
journal = "Journal of Micro/ Nanolithography, MEMS, and MOEMS",
issn = "1932-5150",
publisher = "SPIE",
number = "1",

}

Special section guest editorial : Theory and practice of MEMS, NEMS, and MOEMS. / Lin, Yu-Cheng.

In: Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 10, No. 1, 011501, 01.01.2011.

Research output: Contribution to journalEditorial

TY - JOUR

T1 - Special section guest editorial

T2 - Theory and practice of MEMS, NEMS, and MOEMS

AU - Lin, Yu-Cheng

PY - 2011/1/1

Y1 - 2011/1/1

UR - http://www.scopus.com/inward/record.url?scp=79955958248&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=79955958248&partnerID=8YFLogxK

U2 - 10.1117/1.3567190

DO - 10.1117/1.3567190

M3 - Editorial

VL - 10

JO - Journal of Micro/ Nanolithography, MEMS, and MOEMS

JF - Journal of Micro/ Nanolithography, MEMS, and MOEMS

SN - 1932-5150

IS - 1

M1 - 011501

ER -