Special section guest editorial: Theory and practice of MEMS, NEMS, and MOEMS

Research output: Contribution to journalEditorialpeer-review

Original languageEnglish
Article number011501
JournalJournal of Micro/Nanolithography, MEMS, and MOEMS
Volume10
Issue number1
DOIs
Publication statusPublished - 2011

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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