Speciation of nano-copper collected in molecular sieves from chemical-mechanical planarization wastewater

Hsin Liang Huang, H. Paul Wang

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)

Abstract

Experimentally, 70-80% of copper in the chemical-mechanical planarization (CMP) wastewater was abstracted in the molecular sieve MCM-41 and zeolites Y at 298 K (for 4 h). The least-square fitted X-ray absorption near edge structural (XANES) spectra showed that mainly CuO clusters (47%) and adsorbed copper (CuO) (22%) were abstracted in MCM-41. In zeolite Y, CuO clusters (42%), Cu 2+ (41%) and CuO (14%) were found. Moreover, about 20% of nano-CuO in the CMP wastewater were abstracted and formed as CuO clusters in the channels of MCM-41. The Fourier transformed extended X-ray absorption fine structural (EXAFS) data also indicated that the abstracted copper in MCM-41 or zeolite Y possessed CuO bond distances of 1.96-1.97 Å with a coordination number (CN) of 3.4.

Original languageEnglish
Pages (from-to)307-309
Number of pages3
JournalJournal of Electron Spectroscopy and Related Phenomena
Volume144-147
DOIs
Publication statusPublished - 2005 Jun

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Radiation
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Spectroscopy
  • Physical and Theoretical Chemistry

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