Squeeze film effects on dynamic performance of MEMS μ-mirrors- consideration of gas rarefaction and surface roughness

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Abstract

The squeeze film behavior of MEMS torsion mirrors is modeled, analyzed and discussed. Effects of gas rarefaction (first-order slip-flow model with non-symmetric accommodation coefficients, ACs) and surface roughness are considered simultaneously by using the average Reynolds type equation (ARTE). Based on the operating conditions with small variations in film thickness and pressure, the ARTE is linearized. A coordinate transformation, by stretching or contracting the axes by referring to the roughness flow factors, is proposed to transform the linearized ARTE into a diffusion type modal equation. The dynamic coefficients (stiffness and damping coefficients) are then derived and expressed in analytical form. The results show that the tilting frequency (or Γ0 squeeze number), roughness parameters (γ Peklenik numbers, σ standard deviation of composite roughness) and gas rarefaction parameters (D inverse Knudsen number, α1, α2: ACs) are all important parameters on analyzing the dynamic performance of MEMS torsion mirrors.

Original languageEnglish
Pages (from-to)315-324
Number of pages10
JournalMicrosystem Technologies
Volume14
Issue number3
DOIs
Publication statusPublished - 2008 Mar

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering

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