Stacked Triple Ultraviolet-Band Metal-Semiconductor-Metal Photodetectors

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)


To extend the sensing wavelength band, triple ultraviolet-band metal-semiconductor-metal ultraviolet photodetectors (MSM-UVPDs) were fabricated and studied in this study. Using a radio frequency magnetron sputtering system, the ZnO films, TiO2 films, and AlN films were sequentially stacked on quartz substrates. The cutoff wavelengths of the ZnO-based, TiO2-based, and AlN-based MSM-UVPDs were 370, 310, and 220 nm, respectively. The associated photoresponsivity of 47, 142, and 83 mA/W and the associated specific detectivity of 2.02 × 1010, 9.15 × 1010, and 2.20 × 1011 cm·Hz1/2 · W-1 were obtained, respectively. By probing the common pad and each UV pad, the performance of the UVA, UVB, and UVC wavelength band could be measured, respectively. The performance of dual-band could be obtained by probing the common pad and the two connected UV pads. Moreover, by probing the common mode and the three connected UV pads in the stacked MSM-UVPDs, the performance of triple ultraviolet bands could be obtained. Because the photoresponsivity in the visible wavelength band was very low, the triple-band MSM-UVPDs can work as solar blind UVPDs. The dominant noise was the flicker noise.

Original languageEnglish
Article number8531693
Pages (from-to)15-18
Number of pages4
JournalIEEE Photonics Technology Letters
Issue number1
Publication statusPublished - 2019 Jan 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering


Dive into the research topics of 'Stacked Triple Ultraviolet-Band Metal-Semiconductor-Metal Photodetectors'. Together they form a unique fingerprint.

Cite this