Static analysis of spiral-grooved gas film face seal in microsystem

Chi Cuong Nguyen, Hsiang Chin Jao, Wang Long Li

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The steady performance of spiral-grooved gas film face seal (SGGFFS) is discussed in micro systems. The gas rarefaction effects are considered on sealing performance analysis with two important parameters of Knudsen number (Kn) and accommodation coefficients (ACs). The modified molecular gas lubrication (MMGL) equation is utilized in the analysis of micro gas sealing with considering the gas rarefaction effect. The databases of Poiseuille and Couette flow rate correctors are simultaneously applied in the MMGL equation to expand the lubrication equation with the arbitrary Kn and ACs parameters. Then, the steady-state of MMGL equation is solved by the finite element method to obtain gas pressure distribution. The load capacity is obtained by integrating the pressure distribution of gas film over the sealing face domains. Finally some curves of dimensionless load capacity are depicted for good sealing performance under the operating conditions and gas rarefactions effects.

Original languageEnglish
Title of host publication2015 IFToMM World Congress Proceedings, IFToMM 2015
PublisherNational Taiwan University
ISBN (Electronic)9789860460988
DOIs
Publication statusPublished - 2015 Jan 1
Event14th International Federation for the Promotion of Mechanism and Machine Science World Congress, IFToMM 2015 - Taipei, Taiwan
Duration: 2015 Oct 252015 Oct 30

Publication series

Name2015 IFToMM World Congress Proceedings, IFToMM 2015

Other

Other14th International Federation for the Promotion of Mechanism and Machine Science World Congress, IFToMM 2015
CountryTaiwan
CityTaipei
Period15-10-2515-10-30

Fingerprint

Microsystems
Static analysis
Seals
Gases
Lubrication
Pressure distribution
Spiral
Seal
Gas
Flow rate
Finite element method
Sealing
Equations

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • History

Cite this

Nguyen, C. C., Jao, H. C., & Li, W. L. (2015). Static analysis of spiral-grooved gas film face seal in microsystem. In 2015 IFToMM World Congress Proceedings, IFToMM 2015 (2015 IFToMM World Congress Proceedings, IFToMM 2015). National Taiwan University. https://doi.org/10.6567/IFToMM.14TH.WC.PS18.004
Nguyen, Chi Cuong ; Jao, Hsiang Chin ; Li, Wang Long. / Static analysis of spiral-grooved gas film face seal in microsystem. 2015 IFToMM World Congress Proceedings, IFToMM 2015. National Taiwan University, 2015. (2015 IFToMM World Congress Proceedings, IFToMM 2015).
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title = "Static analysis of spiral-grooved gas film face seal in microsystem",
abstract = "The steady performance of spiral-grooved gas film face seal (SGGFFS) is discussed in micro systems. The gas rarefaction effects are considered on sealing performance analysis with two important parameters of Knudsen number (Kn) and accommodation coefficients (ACs). The modified molecular gas lubrication (MMGL) equation is utilized in the analysis of micro gas sealing with considering the gas rarefaction effect. The databases of Poiseuille and Couette flow rate correctors are simultaneously applied in the MMGL equation to expand the lubrication equation with the arbitrary Kn and ACs parameters. Then, the steady-state of MMGL equation is solved by the finite element method to obtain gas pressure distribution. The load capacity is obtained by integrating the pressure distribution of gas film over the sealing face domains. Finally some curves of dimensionless load capacity are depicted for good sealing performance under the operating conditions and gas rarefactions effects.",
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Nguyen, CC, Jao, HC & Li, WL 2015, Static analysis of spiral-grooved gas film face seal in microsystem. in 2015 IFToMM World Congress Proceedings, IFToMM 2015. 2015 IFToMM World Congress Proceedings, IFToMM 2015, National Taiwan University, 14th International Federation for the Promotion of Mechanism and Machine Science World Congress, IFToMM 2015, Taipei, Taiwan, 15-10-25. https://doi.org/10.6567/IFToMM.14TH.WC.PS18.004

Static analysis of spiral-grooved gas film face seal in microsystem. / Nguyen, Chi Cuong; Jao, Hsiang Chin; Li, Wang Long.

2015 IFToMM World Congress Proceedings, IFToMM 2015. National Taiwan University, 2015. (2015 IFToMM World Congress Proceedings, IFToMM 2015).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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N2 - The steady performance of spiral-grooved gas film face seal (SGGFFS) is discussed in micro systems. The gas rarefaction effects are considered on sealing performance analysis with two important parameters of Knudsen number (Kn) and accommodation coefficients (ACs). The modified molecular gas lubrication (MMGL) equation is utilized in the analysis of micro gas sealing with considering the gas rarefaction effect. The databases of Poiseuille and Couette flow rate correctors are simultaneously applied in the MMGL equation to expand the lubrication equation with the arbitrary Kn and ACs parameters. Then, the steady-state of MMGL equation is solved by the finite element method to obtain gas pressure distribution. The load capacity is obtained by integrating the pressure distribution of gas film over the sealing face domains. Finally some curves of dimensionless load capacity are depicted for good sealing performance under the operating conditions and gas rarefactions effects.

AB - The steady performance of spiral-grooved gas film face seal (SGGFFS) is discussed in micro systems. The gas rarefaction effects are considered on sealing performance analysis with two important parameters of Knudsen number (Kn) and accommodation coefficients (ACs). The modified molecular gas lubrication (MMGL) equation is utilized in the analysis of micro gas sealing with considering the gas rarefaction effect. The databases of Poiseuille and Couette flow rate correctors are simultaneously applied in the MMGL equation to expand the lubrication equation with the arbitrary Kn and ACs parameters. Then, the steady-state of MMGL equation is solved by the finite element method to obtain gas pressure distribution. The load capacity is obtained by integrating the pressure distribution of gas film over the sealing face domains. Finally some curves of dimensionless load capacity are depicted for good sealing performance under the operating conditions and gas rarefactions effects.

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Nguyen CC, Jao HC, Li WL. Static analysis of spiral-grooved gas film face seal in microsystem. In 2015 IFToMM World Congress Proceedings, IFToMM 2015. National Taiwan University. 2015. (2015 IFToMM World Congress Proceedings, IFToMM 2015). https://doi.org/10.6567/IFToMM.14TH.WC.PS18.004