Stress-induced bending of micromachined bilayer cantilever and its optical application

Ju Nan Kuo, Gwo Bin Lee, Wen Fung Pan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Abstract

In this paper, the shape effect of metal films on stress-induced bending of micromachined bilayer cantilever was first systematically investigated. The cantilever makes use of residual stresses in thin films to produce a bending of micro-structures by applying preloads. A finite element analysis (FEA) model was established to analyze such a deformation, with the support of experimental and theoretical results. A new founding on the post-processing temperature of the micromachined structure was reported. The post-processing temperature and residual stresses reveal close relations. While the post-processing temperature ascends, the residual stress of the metal increases, resulting in a bigger out-of-plane deformation of the cantilever. The residual stress rises to a saturated value while the temperature reaches a critical value. Finally, a switchable micromachined corner mirror and a high-speed low-voltage double-switch electrostatically actuated optical crossconnect (OXC) were demonstrated using stress-induced cantilevers.

Original languageEnglish
Title of host publicationProceedings - 2004 IEEE International Conference on Robotics and Biomimetics, IEEE ROBIO 2004
Pages290-295
Number of pages6
Publication statusPublished - 2004 Dec 1
EventProceedings - 2004 IEEE International Conference on Robotics and Biomimetics, IEEE ROBIO 2004 - Shenyang, China
Duration: 2004 Aug 222004 Aug 26

Publication series

NameProceedings - 2004 IEEE International Conference on Robotics and Biomimetics, IEEE ROBIO 2004

Other

OtherProceedings - 2004 IEEE International Conference on Robotics and Biomimetics, IEEE ROBIO 2004
CountryChina
CityShenyang
Period04-08-2204-08-26

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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