Stress-induced bending of micromachined bilayer cantilever and its optical application

Ju Nan Kuo, Gwo Bin Lee, Wen Fung Pan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Citations (Scopus)

Fingerprint Dive into the research topics of 'Stress-induced bending of micromachined bilayer cantilever and its optical application'. Together they form a unique fingerprint.

Engineering & Materials Science