TY - JOUR
T1 - Structural analysis of hydrogenated diamond-like carbon coatings prepared using magnetron sputtering
AU - Su, Y. L.
AU - Yao, S. H.
AU - Mao, Y. H.
AU - You, Z. L.
N1 - Funding Information:
The authors wish to express their gratitude to the Ministry of Science and Technology for financing this research under the grant MOST 105-2221-E-006 -071. The support from the Centre of Noble Equipment, NCKU, Taiwan is also acknowledged.
Publisher Copyright:
© Published under licence by IOP Publishing Ltd.
PY - 2019/2/13
Y1 - 2019/2/13
N2 - In this study, a series of hydrogenated diamond-like carbon (H-DLC) coatings were deposited using an unbalanced magnetron sputtering system. For hydrogenation, acetylene gas was used as the hydrogen source. The typical conditions for preparing DLC coatings were used, with additional acetylene gas being introduced into the depositing chamber. The acetylene flow rate was varied from 0 to 16 sccm at intervals of 4 sccm and finally set at 24 sccm. The chemical composition, microstructure, and phases of the resulting coatings were evaluated. Fourier transform infrared spectrometry, X-ray photoelectron spectroscopy, and Raman analysis were performed, and specific mechanical properties were examined. The results indicated that hydrogenation influenced the H-DLC coatings due to the formation of sp3 bonding. The coating prepared at a flow rate of 8 sccm of acetylene exhibited the highest hardness of 15.4 GPa because it had the highest number of sp3 bonds.
AB - In this study, a series of hydrogenated diamond-like carbon (H-DLC) coatings were deposited using an unbalanced magnetron sputtering system. For hydrogenation, acetylene gas was used as the hydrogen source. The typical conditions for preparing DLC coatings were used, with additional acetylene gas being introduced into the depositing chamber. The acetylene flow rate was varied from 0 to 16 sccm at intervals of 4 sccm and finally set at 24 sccm. The chemical composition, microstructure, and phases of the resulting coatings were evaluated. Fourier transform infrared spectrometry, X-ray photoelectron spectroscopy, and Raman analysis were performed, and specific mechanical properties were examined. The results indicated that hydrogenation influenced the H-DLC coatings due to the formation of sp3 bonding. The coating prepared at a flow rate of 8 sccm of acetylene exhibited the highest hardness of 15.4 GPa because it had the highest number of sp3 bonds.
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U2 - 10.1088/1757-899X/474/1/012010
DO - 10.1088/1757-899X/474/1/012010
M3 - Conference article
AN - SCOPUS:85062494455
SN - 1757-8981
VL - 474
JO - IOP Conference Series: Materials Science and Engineering
JF - IOP Conference Series: Materials Science and Engineering
IS - 1
M1 - 012010
T2 - 7th Global Conference on Materials Science and Engineering, CMSE 2018
Y2 - 1 November 2018 through 4 November 2018
ER -