Structural analysis of hydrogenated diamond-like carbon coatings prepared using magnetron sputtering

Y. L. Su, S. H. Yao, Y. H. Mao, Z. L. You

Research output: Contribution to journalConference articlepeer-review


In this study, a series of hydrogenated diamond-like carbon (H-DLC) coatings were deposited using an unbalanced magnetron sputtering system. For hydrogenation, acetylene gas was used as the hydrogen source. The typical conditions for preparing DLC coatings were used, with additional acetylene gas being introduced into the depositing chamber. The acetylene flow rate was varied from 0 to 16 sccm at intervals of 4 sccm and finally set at 24 sccm. The chemical composition, microstructure, and phases of the resulting coatings were evaluated. Fourier transform infrared spectrometry, X-ray photoelectron spectroscopy, and Raman analysis were performed, and specific mechanical properties were examined. The results indicated that hydrogenation influenced the H-DLC coatings due to the formation of sp3 bonding. The coating prepared at a flow rate of 8 sccm of acetylene exhibited the highest hardness of 15.4 GPa because it had the highest number of sp3 bonds.

Original languageEnglish
Article number012010
JournalIOP Conference Series: Materials Science and Engineering
Issue number1
Publication statusPublished - 2019 Feb 13
Event7th Global Conference on Materials Science and Engineering, CMSE 2018 - Xi'an, China
Duration: 2018 Nov 12018 Nov 4

All Science Journal Classification (ASJC) codes

  • General Materials Science
  • General Engineering


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