Structural analysis of hydrogenated diamond-like carbon coatings prepared using magnetron sputtering

Y. L. Su, S. H. Yao, Y. H. Mao, Z. L. You

Research output: Contribution to journalConference article

Abstract

In this study, a series of hydrogenated diamond-like carbon (H-DLC) coatings were deposited using an unbalanced magnetron sputtering system. For hydrogenation, acetylene gas was used as the hydrogen source. The typical conditions for preparing DLC coatings were used, with additional acetylene gas being introduced into the depositing chamber. The acetylene flow rate was varied from 0 to 16 sccm at intervals of 4 sccm and finally set at 24 sccm. The chemical composition, microstructure, and phases of the resulting coatings were evaluated. Fourier transform infrared spectrometry, X-ray photoelectron spectroscopy, and Raman analysis were performed, and specific mechanical properties were examined. The results indicated that hydrogenation influenced the H-DLC coatings due to the formation of sp3 bonding. The coating prepared at a flow rate of 8 sccm of acetylene exhibited the highest hardness of 15.4 GPa because it had the highest number of sp3 bonds.

Original languageEnglish
Article number012010
JournalIOP Conference Series: Materials Science and Engineering
Volume474
Issue number1
DOIs
Publication statusPublished - 2019 Feb 13
Event7th Global Conference on Materials Science and Engineering, CMSE 2018 - Xi'an, China
Duration: 2018 Nov 12018 Nov 4

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Diamond
Acetylene
Structural analysis
Magnetron sputtering
Diamonds
Carbon
Coatings
Hydrogenation
Gases
Flow rate
Spectrometry
Hydrogen
Fourier transforms
X ray photoelectron spectroscopy
Hardness
Infrared radiation
Mechanical properties
Microstructure
Chemical analysis

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Engineering(all)

Cite this

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title = "Structural analysis of hydrogenated diamond-like carbon coatings prepared using magnetron sputtering",
abstract = "In this study, a series of hydrogenated diamond-like carbon (H-DLC) coatings were deposited using an unbalanced magnetron sputtering system. For hydrogenation, acetylene gas was used as the hydrogen source. The typical conditions for preparing DLC coatings were used, with additional acetylene gas being introduced into the depositing chamber. The acetylene flow rate was varied from 0 to 16 sccm at intervals of 4 sccm and finally set at 24 sccm. The chemical composition, microstructure, and phases of the resulting coatings were evaluated. Fourier transform infrared spectrometry, X-ray photoelectron spectroscopy, and Raman analysis were performed, and specific mechanical properties were examined. The results indicated that hydrogenation influenced the H-DLC coatings due to the formation of sp3 bonding. The coating prepared at a flow rate of 8 sccm of acetylene exhibited the highest hardness of 15.4 GPa because it had the highest number of sp3 bonds.",
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Structural analysis of hydrogenated diamond-like carbon coatings prepared using magnetron sputtering. / Su, Y. L.; Yao, S. H.; Mao, Y. H.; You, Z. L.

In: IOP Conference Series: Materials Science and Engineering, Vol. 474, No. 1, 012010, 13.02.2019.

Research output: Contribution to journalConference article

TY - JOUR

T1 - Structural analysis of hydrogenated diamond-like carbon coatings prepared using magnetron sputtering

AU - Su, Y. L.

AU - Yao, S. H.

AU - Mao, Y. H.

AU - You, Z. L.

PY - 2019/2/13

Y1 - 2019/2/13

N2 - In this study, a series of hydrogenated diamond-like carbon (H-DLC) coatings were deposited using an unbalanced magnetron sputtering system. For hydrogenation, acetylene gas was used as the hydrogen source. The typical conditions for preparing DLC coatings were used, with additional acetylene gas being introduced into the depositing chamber. The acetylene flow rate was varied from 0 to 16 sccm at intervals of 4 sccm and finally set at 24 sccm. The chemical composition, microstructure, and phases of the resulting coatings were evaluated. Fourier transform infrared spectrometry, X-ray photoelectron spectroscopy, and Raman analysis were performed, and specific mechanical properties were examined. The results indicated that hydrogenation influenced the H-DLC coatings due to the formation of sp3 bonding. The coating prepared at a flow rate of 8 sccm of acetylene exhibited the highest hardness of 15.4 GPa because it had the highest number of sp3 bonds.

AB - In this study, a series of hydrogenated diamond-like carbon (H-DLC) coatings were deposited using an unbalanced magnetron sputtering system. For hydrogenation, acetylene gas was used as the hydrogen source. The typical conditions for preparing DLC coatings were used, with additional acetylene gas being introduced into the depositing chamber. The acetylene flow rate was varied from 0 to 16 sccm at intervals of 4 sccm and finally set at 24 sccm. The chemical composition, microstructure, and phases of the resulting coatings were evaluated. Fourier transform infrared spectrometry, X-ray photoelectron spectroscopy, and Raman analysis were performed, and specific mechanical properties were examined. The results indicated that hydrogenation influenced the H-DLC coatings due to the formation of sp3 bonding. The coating prepared at a flow rate of 8 sccm of acetylene exhibited the highest hardness of 15.4 GPa because it had the highest number of sp3 bonds.

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