Structural and mechanical properties of pre-strained transparent conducting oxide films on flexible substrate

Po Tsung Hsieh, Tse Chang Li, Bo-Hsiung Wu, Chung Jen Chung, Jen Fin Lin

Research output: Contribution to journalArticlepeer-review

9 Citations (Scopus)

Abstract

Among popular transparent conducting oxide (TCO) materials, indium tin oxide (ITO) and aluminum-doped zinc oxide (AZO) are expected to be the most applicable for the TCO layer of solar cells due to their resistance to a reductive ambient and their transparency to infrared wavelengths. In this study, ITO and AZO are deposited by a sputtering system with various pre-strain forces applied to the substrate. According to the X-ray diffraction results, the intensities of the characteristic peaks for ITO and AZO films decrease at a certain pre-strain ratio. Decreases for ITO and AZO films occur at pre-strain levels of 2% and 4%, respectively. Scanning electron microscopy images show that some fissures and cracks appear for the 2%-ITO film. The mechanical properties and the interface adhesion energy between the films and the substrates are investigated using a nanoindentation system. The results demonstrate that the hardness and elastic modulus of ITO and AZO thin films reach a critical point at pre-strain levels of 2% and 4%, respectively. When the pre-strain level is over 4%, cracks appear in the ITO thin film.

Original languageEnglish
Pages (from-to)443-446
Number of pages4
JournalSurface and Coatings Technology
Volume231
DOIs
Publication statusPublished - 2013 Sep 25

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Materials Chemistry

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