Structural design of a silicon micro turbo generator

Kuo Shen Chen, S. Mark Spearing, Noel N. Nemeth

Research output: Contribution to journalConference articlepeer-review


This paper presents the probabilistic structural analysis and design of a silicon micro turbo generator rotor. This rotor was designed to have a tip speed of 500 m/s. 3D finite element analysis, fracture strength characterization of single crystal silicon, and structural failure probability calculations were performed. The results show that the design of a micro turbo generator rotor, although highly stressed, is feasible. However, it is important to note that this feasibility is very dependent on the fabrication process achieving a high surface quality. The overall approach, and tests employed are equally applicable to other highly stressed MEMS devices.

Original languageEnglish
Pages (from-to)1144-1153
Number of pages10
JournalCollection of Technical Papers - AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics and Materials Conference
Publication statusPublished - 1999
EventProceedings of the 1999 AIAA/ASME/ASCE/AHS/ASC Structrures, Structural Dynamics, and Materials Conference and Exhibit - St. Louis, MO, USA
Duration: 1999 Apr 121999 Apr 15

All Science Journal Classification (ASJC) codes

  • Architecture
  • Materials Science(all)
  • Aerospace Engineering
  • Mechanics of Materials
  • Mechanical Engineering


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