Abstract
This paper presents the probabilistic structural analysis and design of a silicon micro turbo generator rotor. This rotor was designed to have a tip speed of 500 m/s. 3D finite element analysis, fracture strength characterization of single crystal silicon, and structural failure probability calculations were performed. The results show that the design of a micro turbo generator rotor, although highly stressed, is feasible. However, it is important to note that this feasibility is very dependent on the fabrication process achieving a high surface quality. The overall approach, and tests employed are equally applicable to other highly stressed MEMS devices.
| Original language | English |
|---|---|
| Pages (from-to) | 1144-1153 |
| Number of pages | 10 |
| Journal | Collection of Technical Papers - AIAA/ASME/ASCE/AHS/ASC Structures, Structural Dynamics and Materials Conference |
| Volume | 2 |
| Publication status | Published - 1999 |
| Event | Proceedings of the 1999 AIAA/ASME/ASCE/AHS/ASC Structrures, Structural Dynamics, and Materials Conference and Exhibit - St. Louis, MO, USA Duration: 1999 Apr 12 → 1999 Apr 15 |
All Science Journal Classification (ASJC) codes
- Architecture
- Materials Science(all)
- Aerospace Engineering
- Mechanics of Materials
- Mechanical Engineering