Structural evolution of AlN nano-structures: Nanotips and nanorods

Shih Chen Shi, Surojit Chattopadhyay, Chia Fu Chen, Kuei Hsien Chen, Li Chyong Chen

Research output: Contribution to journalArticlepeer-review

40 Citations (Scopus)

Abstract

Aluminum nitride (AlN) nanostructures were prepared using thermal chemical vapour deposition process. At growth temperatures of 950 °C, AlN nanotips with apex diameters of 10 nm, base diameters of ∼100 nm, and length of ∼2000 nm were obtained. Whereas when the growth temperature was 1200 °C, we obtained shorter and thicker AlN nanorods. Compelling microscopic evidences were obtained to show that stacked AlN platelets of diminishing size formed the building blocks for the nanotips. A reducing Ehrlich-Schwoebel barrier introduced into a diffusion mediated growth model explains the formation of AlN nanorods at increasing growth temperatures.

Original languageEnglish
Pages (from-to)152-157
Number of pages6
JournalChemical Physics Letters
Volume418
Issue number1-3
DOIs
Publication statusPublished - 2006 Jan 25

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)
  • Physical and Theoretical Chemistry

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