Structural study of NiO_x thin films fabricated by radio frequency sputtering at low temperature

Engineering & Materials Science

• Spectroscopic ellipsometry 100%
• Sputtering 70%
• Thin films 52%
• Scanning electron microscopy 43%
• Nickel oxide 43%
• Substrates 38%
• Crystal growth 38%
• Oxide films 34%
• Crystals 27%
• X ray diffraction 27%
• Temperature 22%

Physics & Astronomy

• ellipsometry 53%
• radio frequencies 47%
• sputtering 43%
• scanning electron microscopy 35%
• nickel oxides 34%
• thin films 28%
• crystal growth 25%
• damage 19%
• diffraction 14%
• crystals 13%
• x rays 12%

Chemical Compounds

• Ellipsometry 60%
• Sputtering 59%
• Scanning Electron Microscopy 32%
• Crystal Growth 26%
• Column Like Crystal 16%
• Oxide 14%
• X-Ray Diffraction 13%