Structures and opto-electrical characteristics of ZITO thin films

F. Y. Hung, K. J. Chen, S. J. Chang, S. J. Young, Z. S. Hu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publication2009 International Semiconductor Device Research Symposium, ISDRS '09
DOIs
Publication statusPublished - 2009 Dec 1
Event2009 International Semiconductor Device Research Symposium, ISDRS '09 - College Park, MD, United States
Duration: 2009 Dec 92009 Dec 11

Publication series

Name2009 International Semiconductor Device Research Symposium, ISDRS '09

Other

Other2009 International Semiconductor Device Research Symposium, ISDRS '09
CountryUnited States
CityCollege Park, MD
Period09-12-0909-12-11

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Thin films

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

Cite this

Hung, F. Y., Chen, K. J., Chang, S. J., Young, S. J., & Hu, Z. S. (2009). Structures and opto-electrical characteristics of ZITO thin films. In 2009 International Semiconductor Device Research Symposium, ISDRS '09 [5378181] (2009 International Semiconductor Device Research Symposium, ISDRS '09). https://doi.org/10.1109/ISDRS.2009.5378181
Hung, F. Y. ; Chen, K. J. ; Chang, S. J. ; Young, S. J. ; Hu, Z. S. / Structures and opto-electrical characteristics of ZITO thin films. 2009 International Semiconductor Device Research Symposium, ISDRS '09. 2009. (2009 International Semiconductor Device Research Symposium, ISDRS '09).
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Hung, FY, Chen, KJ, Chang, SJ, Young, SJ & Hu, ZS 2009, Structures and opto-electrical characteristics of ZITO thin films. in 2009 International Semiconductor Device Research Symposium, ISDRS '09., 5378181, 2009 International Semiconductor Device Research Symposium, ISDRS '09, 2009 International Semiconductor Device Research Symposium, ISDRS '09, College Park, MD, United States, 09-12-09. https://doi.org/10.1109/ISDRS.2009.5378181

Structures and opto-electrical characteristics of ZITO thin films. / Hung, F. Y.; Chen, K. J.; Chang, S. J.; Young, S. J.; Hu, Z. S.

2009 International Semiconductor Device Research Symposium, ISDRS '09. 2009. 5378181 (2009 International Semiconductor Device Research Symposium, ISDRS '09).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Hung FY, Chen KJ, Chang SJ, Young SJ, Hu ZS. Structures and opto-electrical characteristics of ZITO thin films. In 2009 International Semiconductor Device Research Symposium, ISDRS '09. 2009. 5378181. (2009 International Semiconductor Device Research Symposium, ISDRS '09). https://doi.org/10.1109/ISDRS.2009.5378181