Studies of ion irradiation effects in hydrogenated amorphous carbon thin films by X-ray absorption and photoemission spectroscopy

S. C. Ray, K. P.Krishna Kumar, H. M. Tsai, J. W. Chiou, C. W. Pao, W. F. Pong, M. H. Tsai, B. H. Wu, C. R. Sheu, C. C. Chen, Franklin C.N. Hong, H. H. Cheng, A. Dalakyan

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9 Citations (Scopus)

Abstract

C K-edge X-ray absorption near-edge structure (XANES) and valence-band photoemission spectroscopy (PES) measurements were taken for hydrogenated amorphous carbon films before and after ion beam irradiation. The C K-edge XANES and valence-band PES spectra indicate that irradiation breaks C-C bonds to form C{double bond, long}C bonds and has a similar effect on the electronic structures of the films, irrespective of the hydrogen content. The valence-band PES measurements reveal that ion beam irradiation markedly enhances the density of carbon π states in the vicinity of the Fermi level.

Original languageEnglish
Pages (from-to)3374-3377
Number of pages4
JournalThin Solid Films
Volume516
Issue number10
DOIs
Publication statusPublished - 2008 Mar 31

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry

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