Study of a Formaldehyde Gas Sensor Based on a Sputtered Vanadium Pentoxide Thin Film Decorated with Gold Nanoparticles

Jing Shiuan Niu, I-Ping Liu, Yen Lin Pan, Jung Hui Tsai, Wen Chau Liu

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1 Citation (Scopus)

Abstract

Formaldehyde (HCHO) gas sensing properties of a new sensor based on a sputtered vanadium pentoxide (V2O5) thin film decorated with evaporated gold (Au) nanoparticles (NPs) are studied and reported herein. The use of Au NPs effectively increases the surface area/volume (SA/V) ratio and enhances the catalytic activity of Au metal. Experimentally, good p-type sensing characteristics, including a high sensing response ratio of 73.1% under 20 ppm HCHO/air gas and a small recovery time of 6.8 s at 225 °C, are obtained. An extremely low detecting level of 15 ppb HCHO/air is also acquired. Due to these advantages and the benefits of simple structure and easy fabrication, the studied Au NP/V2O5 device is an excellent candidate for p-type consumption formaldehyde gas sensing and complementary metal oxide sensor array (CMOSA) applications.

Original languageEnglish
Article number087001
JournalECS Journal of Solid State Science and Technology
Volume10
Issue number8
DOIs
Publication statusPublished - 2021

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials

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