TY - JOUR
T1 - Study of a platinum nanoparticle (Pt NP)/amorphous In-Ga-Zn-O (A-IGZO) thin-film-based ammonia gas sensor
AU - Chen, Po Lin
AU - Liu, I. Ping
AU - Chen, Wei Cheng
AU - Niu, Jing Shiuan
AU - Liu, Wen Chau
N1 - Funding Information:
Part of this work was supported under the Contract MOST 108-2221-E006-045 . Technical assistance on SEM operation from Miss Hui-Jung Shih at Instrument Center, National Cheng-Kung University is appreciated.
Publisher Copyright:
© 2020 Elsevier B.V.
PY - 2020/11/1
Y1 - 2020/11/1
N2 - A new ammonia (NH3) gas sensor, based on the incorporation of platinum nanoparticles (Pt NPs) and an amorphous In-Ga-Zn-O (a-IGZO) thin film, is fabricated by thermal evaporation (TE) and sputtering approaches. Due to the increased specific surface area and remarkable catalytic activity of Pt NPs, excellent ammonia sensing properties, including a very high sensing response of 1467 (in 1000 ppm NH3/air gas at 250 °C), an extremely low detecting level of 1 ppm NH3/air, a relatively low optimum operating temperature of 250 °C, and a relatively fast sensing speed, are obtained. In addition, the studied Pt NP/a-IGZO device exhibits the advantages of a simple structure, easy fabrication, and a high selectivity towards ammonia gas. The studied device is, therefore, promising for high-performance ammonia sensing applications.
AB - A new ammonia (NH3) gas sensor, based on the incorporation of platinum nanoparticles (Pt NPs) and an amorphous In-Ga-Zn-O (a-IGZO) thin film, is fabricated by thermal evaporation (TE) and sputtering approaches. Due to the increased specific surface area and remarkable catalytic activity of Pt NPs, excellent ammonia sensing properties, including a very high sensing response of 1467 (in 1000 ppm NH3/air gas at 250 °C), an extremely low detecting level of 1 ppm NH3/air, a relatively low optimum operating temperature of 250 °C, and a relatively fast sensing speed, are obtained. In addition, the studied Pt NP/a-IGZO device exhibits the advantages of a simple structure, easy fabrication, and a high selectivity towards ammonia gas. The studied device is, therefore, promising for high-performance ammonia sensing applications.
UR - http://www.scopus.com/inward/record.url?scp=85088235512&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85088235512&partnerID=8YFLogxK
U2 - 10.1016/j.snb.2020.128592
DO - 10.1016/j.snb.2020.128592
M3 - Article
AN - SCOPUS:85088235512
SN - 0925-4005
VL - 322
JO - Sensors and Actuators, B: Chemical
JF - Sensors and Actuators, B: Chemical
M1 - 128592
ER -