Study of a platinum nanoparticle (Pt NP)/amorphous In-Ga-Zn-O (A-IGZO) thin-film-based ammonia gas sensor

Po Lin Chen; I. Ping Liu; Wei Cheng Chen; Jing Shiuan Niu; Wen Chau Liu

doi:10.1016/j.snb.2020.128592

Study of a platinum nanoparticle (Pt NP)/amorphous In-Ga-Zn-O (A-IGZO) thin-film-based ammonia gas sensor

Po Lin Chen
, I. Ping Liu
, Wei Cheng Chen
, Jing Shiuan Niu
, Wen Chau Liu

Research output: Contribution to journal › Article › peer-review

29 Citations (Scopus)

Abstract

A new ammonia (NH₃) gas sensor, based on the incorporation of platinum nanoparticles (Pt NPs) and an amorphous In-Ga-Zn-O (a-IGZO) thin film, is fabricated by thermal evaporation (TE) and sputtering approaches. Due to the increased specific surface area and remarkable catalytic activity of Pt NPs, excellent ammonia sensing properties, including a very high sensing response of 1467 (in 1000 ppm NH₃/air gas at 250 °C), an extremely low detecting level of 1 ppm NH₃/air, a relatively low optimum operating temperature of 250 °C, and a relatively fast sensing speed, are obtained. In addition, the studied Pt NP/a-IGZO device exhibits the advantages of a simple structure, easy fabrication, and a high selectivity towards ammonia gas. The studied device is, therefore, promising for high-performance ammonia sensing applications.

Original language	English
Article number	128592
Journal	Sensors and Actuators, B: Chemical
Volume	322
DOIs	https://doi.org/10.1016/j.snb.2020.128592
Publication status	Published - 2020 Nov 1

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering
Materials Chemistry

Access to Document

10.1016/j.snb.2020.128592

Cite this

@article{abdae63d852d4e44a2830144a37171be,

title = "Study of a platinum nanoparticle (Pt NP)/amorphous In-Ga-Zn-O (A-IGZO) thin-film-based ammonia gas sensor",

abstract = "A new ammonia (NH3) gas sensor, based on the incorporation of platinum nanoparticles (Pt NPs) and an amorphous In-Ga-Zn-O (a-IGZO) thin film, is fabricated by thermal evaporation (TE) and sputtering approaches. Due to the increased specific surface area and remarkable catalytic activity of Pt NPs, excellent ammonia sensing properties, including a very high sensing response of 1467 (in 1000 ppm NH3/air gas at 250 °C), an extremely low detecting level of 1 ppm NH3/air, a relatively low optimum operating temperature of 250 °C, and a relatively fast sensing speed, are obtained. In addition, the studied Pt NP/a-IGZO device exhibits the advantages of a simple structure, easy fabrication, and a high selectivity towards ammonia gas. The studied device is, therefore, promising for high-performance ammonia sensing applications.",

author = "Chen, \{Po Lin\} and Liu, \{I. Ping\} and Chen, \{Wei Cheng\} and Niu, \{Jing Shiuan\} and Liu, \{Wen Chau\}",

note = "Funding Information: Part of this work was supported under the Contract MOST 108-2221-E006-045 . Technical assistance on SEM operation from Miss Hui-Jung Shih at Instrument Center, National Cheng-Kung University is appreciated. Publisher Copyright: {\textcopyright} 2020 Elsevier B.V.",

year = "2020",

month = nov,

day = "1",

doi = "10.1016/j.snb.2020.128592",

language = "English",

volume = "322",

journal = "Sensors and Actuators, B: Chemical",

issn = "0925-4005",

publisher = "Elsevier BV",

}

TY - JOUR

T1 - Study of a platinum nanoparticle (Pt NP)/amorphous In-Ga-Zn-O (A-IGZO) thin-film-based ammonia gas sensor

AU - Chen, Po Lin

AU - Liu, I. Ping

AU - Chen, Wei Cheng

AU - Niu, Jing Shiuan

AU - Liu, Wen Chau

N1 - Funding Information: Part of this work was supported under the Contract MOST 108-2221-E006-045 . Technical assistance on SEM operation from Miss Hui-Jung Shih at Instrument Center, National Cheng-Kung University is appreciated. Publisher Copyright: © 2020 Elsevier B.V.

PY - 2020/11/1

Y1 - 2020/11/1

N2 - A new ammonia (NH3) gas sensor, based on the incorporation of platinum nanoparticles (Pt NPs) and an amorphous In-Ga-Zn-O (a-IGZO) thin film, is fabricated by thermal evaporation (TE) and sputtering approaches. Due to the increased specific surface area and remarkable catalytic activity of Pt NPs, excellent ammonia sensing properties, including a very high sensing response of 1467 (in 1000 ppm NH3/air gas at 250 °C), an extremely low detecting level of 1 ppm NH3/air, a relatively low optimum operating temperature of 250 °C, and a relatively fast sensing speed, are obtained. In addition, the studied Pt NP/a-IGZO device exhibits the advantages of a simple structure, easy fabrication, and a high selectivity towards ammonia gas. The studied device is, therefore, promising for high-performance ammonia sensing applications.

AB - A new ammonia (NH3) gas sensor, based on the incorporation of platinum nanoparticles (Pt NPs) and an amorphous In-Ga-Zn-O (a-IGZO) thin film, is fabricated by thermal evaporation (TE) and sputtering approaches. Due to the increased specific surface area and remarkable catalytic activity of Pt NPs, excellent ammonia sensing properties, including a very high sensing response of 1467 (in 1000 ppm NH3/air gas at 250 °C), an extremely low detecting level of 1 ppm NH3/air, a relatively low optimum operating temperature of 250 °C, and a relatively fast sensing speed, are obtained. In addition, the studied Pt NP/a-IGZO device exhibits the advantages of a simple structure, easy fabrication, and a high selectivity towards ammonia gas. The studied device is, therefore, promising for high-performance ammonia sensing applications.

UR - https://www.scopus.com/pages/publications/85088235512

UR - https://www.scopus.com/pages/publications/85088235512#tab=citedBy

U2 - 10.1016/j.snb.2020.128592

DO - 10.1016/j.snb.2020.128592

M3 - Article

AN - SCOPUS:85088235512

SN - 0925-4005

VL - 322

JO - Sensors and Actuators, B: Chemical

JF - Sensors and Actuators, B: Chemical

M1 - 128592

ER -

Study of a platinum nanoparticle (Pt NP)/amorphous In-Ga-Zn-O (A-IGZO) thin-film-based ammonia gas sensor

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this